Danelle M. Tanner

MEMS reliability in shock environments

In order to determine the susceptibility of our MEMS (MicroElectroMechanical Systems) devices to shock, tests were performed using haversine shock pulses with widths of 1 to 0.2 ms in the range from 500 g to 40000 g. We chose a surface-micromachined microengine because it has all the components needed for evaluation: springs that flex, gears that are anchored, and clamps and spring stops to maintain alignment. The microengines, which were unpowered for the tests, performed quite well at most shock levels with a majority functioning after the impact. Debris from the die edges moved at levels greater than 4000 g causing shorts in the actuators and posing reliability concerns. The coupling agent used to prevent stiction in the MEMS release weakened the die-attach bond, which produced failures at 10000 g and above. At 20000 g we began to observe structural damage in some of the thin flexures and 2.5-micron diameter pin joints. We observed electrical failures caused by the movement of debris. Additionally, we observed a new failure mode where stationary comb fingers contact the ground plane resulting in electrical shorts. These new failures were observed in our control group indicating that they were not shock related.

The effect of humidity on the reliability of a surface micromachined microengine

Humidity is shown to be a strong factor in the wear of rubbing surfaces in polysilicon micromachines. We demonstrate that very low humidity can lead to very high wear without a significant change in reliability. We show that the volume of wear debris generated is a function of the humidity in an air environment. As the humidity decreases, the wear debris generated increases. For the higher humidity levels, the formation of surface hydroxides may act as a lubricant. The dominant failure mechanism has been identified as wear. The wear debris has been identified as amorphous oxidized silicon. Large slivers (approximately 1 /spl mu/m in length) of debris observed at the low humidity level were also amorphous oxidized silicon. Using transmission electron microscopy (TEM), we observed that the wear debris forms spherical and rod-like shapes. We compared two surface treatment processes: a fluorinated silane chain (FTS) process and supercritical CO/sub 2/ dried (SCCO/sub 2/) process. The microengines using the SCCO/sub 2/ process were found to be less reliable than those released with the FTS process under two humidity levels.

MEMS reliability: Where are we now?

This paper reviews the significant successes in MEMS products from a reliability perspective. MEMS reliability is challenging and can be device and process dependent, but exercising the proper reliability techniques very early in product development has yielded success for many manufacturers. The reliability concerns of various devices are discussed including ink jet printhead, inertial sensors, pressure sensors, micro-mirror arrays, and the emerging applications of RF switches and resonators. Metal contacting RF switches are susceptible to hydrocarbon contamination which can increase the contact resistance over cycle count. Packaging techniques are described in the context of the whole reliability program.

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

The effect of frequency on the lifetime of a surface micromachined microengine driving a load

Experiments have been performed on surface micromachined microengines driving load gears to determine the effect of the rotation frequency on median cycles to failure. We did observe a frequency dependence and have developed a model based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and, in a few instances, led to fracture of the pin joint in the drive gear.

First Reliability Test of a Surface Micromachined Microengine Using SHiMMeR

The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate, and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines, we designed and built an automated system that has the capability to simultaneously test 256 packaged micromachines. The Sandia high volume measurement of micromachine reliability system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

MEMS reliability in a vibration environment

MicroElectroMechanical Systems (MEMS) were subjected to a vibration environment that had a peak acceleration of 120 g and spanned frequencies from 20 to 2000 Hz. The device chosen for this test was a surface-micromachined microengine because it possesses many elements (springs, gears, rubbing surfaces) that may be susceptible to vibration. The microengines were unpowered during the test. We observed 2 vibration-related failures and 3 electrical failures out of 22 microengines tested. Surprisingly, the electrical failures also arose in four microengines in our control group indicating that they were not vibration related. Failure analysis revealed that the electrical failures were due to shorting of stationary comb fingers to the ground plane.

Wear Mechanisms in a Reliability Methodology

The main thrust in any reliability work is identifying failure modes and mechanisms. This is especially true for the new technology of MicroElectroMechanical Systems (MEMS). The methods are sometimes just as important as the results achieved. This paper will review some of the methods developed specifically for MEMS. Our methodology uses statistical characterization and testing of complex MEMS devices to help us identify dominant failure modes. We strive to determine the root cause of each failure mode and to gain a fundamental understanding of that mechanism. Test structures designed to be sensitive to a particular failure mechanism are typically used to gain understanding. The development of predictive models follows from this basic understanding. This paper will focus on the failure mechanism of wear and how our methodology was exercised to provide a predictive model. The MEMS device stressed in these studies was a Sandia-developed microengine with orthogonal electrostatic linear actuators connected to a gear on a hub. The dominant failure mechanism was wear in the sliding/contacting regions. A sliding beam-on-post test structure was also used to measure friction coefficients and wear morphology for different surface coatings and environments. Results show that a predictive model of failure-time as a function of drive frequency based on wear fits the functional form of the reliability data quite well, and demonstrates the benefit of a fundamental understanding of wear. The results also show that while debris of similar chemistry and morphology was created in the two types of devices, the dependence of debris generation on the operating environment was entirely different. The differences are discussed in terms of wear maps for ceramics, and the mechanical and thermal contact conditions in each device.

Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode

Electrostatic discharge (ESD) and electrical overstress (EOS) damage of Micro-Electrical-Mechanical Systems (MEMS) has been identified as a new failure mode. This failure mode has not been previously recognized or addressed primarily due to the mechanical nature and functionality of these systems, as well as the physical failure signature that resembles stiction. Because many MEMS devices function by electrostatic actuation, the possibility of these devices not only being susceptible to ESD or EOS damage but also having a high probability of suffering catastrophic failure doe to ESD or EOS is very real. Results from previous experiments have shown stationary comb fingers adhered to the ground plane on MEMS devices tested in shock, vibration, and benign environments [1,2]. Using Sandia polysilicon microengines, we have conducted tests to establish and explain the EDS/EOS failure mechanism of MEMS devices. These devices were electronically and optically inspected prior to and after ESD and EOS testing. This paper will address the issues surrounding MEMS susceptibility to ESD and EOS damage as well as describe the experimental method and results found from EDS and EOS testing. The tests were conducting using conventional IC failure analysis and reliability assessment characterization tools. In this paper we will also present a thermal model to accurately depict the heat exchange between an electrostatic comb finger and the ground plane during an ESD event.

Frequency dependence of the lifetime of a surface micromachined microengine driving a load

Abstract Experiments have been performed on surface micromachined microengines driving load gears to determine the rotational frequency dependence on median cycles to failure. A sample of 272 microengines, each driving a load, was stressed at eight different frequencies. Frequency dependence was observed and a model was developed based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and in a few instances led to fracture of the pin joint in the drive gear.