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David Y. Wang

KLA-Tencor

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Publication

Featured researches published by David Y. Wang.

Archive | 2002

Measurement system with separate optimized beam paths

David Y. Wang; Lawrence D. Rotter; Jeffrey T. Fanton; Jeffrey E. Mcaninch

Archive | 2005

Methods and systems for generating an inspection process for an inspection system

David Y. Wang; Patrick Huet; Tong Huang; Martin Plihal; Adam Chien-Huei Chen; Mike Van Riet; Stewart K. Hill

Archive | 2005

Broadband wavelength selective filter

David Y. Wang; James Lee Hendrix; Adam E. Norton

Archive | 2012

Dynamically Adjustable Semiconductor Metrology System

David Y. Wang; Guorong Vera Zhuang; Johannes D. De Veer; Kevin Peterlinz; Shankar Krishnan

Archive | 2002

Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers

Lawrence D. Rotter; David Y. Wang

Archive | 2011

DISCRETE POLARIZATION SCATTEROMETRY

Andrew V. Hill; Amnon Manassen; Daniel Kandel; Vladimir Levinski; Joel L. Seligson; Alexander Svizher; David Y. Wang; Lawrence D. Rotter; Johannes D. De Veer

Archive | 2005

Computer-implemented methods for performing one or more defect-related functions

Mark Dishner; Chris W. Lee; Sharon Mccauley; Patrick Huet; David Y. Wang

Archive | 2012

Optical metrology tool equipped with modulated illumination sources

Andrei V. Shchegrov; Lawrence D. Rotter; David Y. Wang; Andrei Veldman; Kevin Peterlinz; Gregory Brady; Derrick Shaughnessy

Archive | 2002

Beam splitter/combiner for optical meterology tool

James Lee Hendrix; David Y. Wang; Michael Ellison; Joel Ng

Archive | 2015

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS

David Y. Wang; Klaus Flock; Lawrence D. Rotter; Shankar Krishnan; Johannes D. De Veer; Catalin Filip; Gregory Brady; M. A. Arain; Andrei V. Shchegrov

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Lawrence D. Rotter

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Shankar Krishnan

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Johannes D. De Veer

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Patrick Huet

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Andrei V. Shchegrov

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Derrick Shaughnessy

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Klaus Flock

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Mark Dishner

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Sharon Mccauley

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Chris W. Lee

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