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Dive into the research topics where David Y. Wang is active.

Publication


Featured researches published by David Y. Wang.


Archive | 2002

Measurement system with separate optimized beam paths

David Y. Wang; Lawrence D. Rotter; Jeffrey T. Fanton; Jeffrey E. Mcaninch


Archive | 2005

Methods and systems for generating an inspection process for an inspection system

David Y. Wang; Patrick Huet; Tong Huang; Martin Plihal; Adam Chien-Huei Chen; Mike Van Riet; Stewart K. Hill


Archive | 2005

Broadband wavelength selective filter

David Y. Wang; James Lee Hendrix; Adam E. Norton


Archive | 2012

Dynamically Adjustable Semiconductor Metrology System

David Y. Wang; Guorong Vera Zhuang; Johannes D. De Veer; Kevin Peterlinz; Shankar Krishnan


Archive | 2002

Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers

Lawrence D. Rotter; David Y. Wang


Archive | 2011

DISCRETE POLARIZATION SCATTEROMETRY

Andrew V. Hill; Amnon Manassen; Daniel Kandel; Vladimir Levinski; Joel L. Seligson; Alexander Svizher; David Y. Wang; Lawrence D. Rotter; Johannes D. De Veer


Archive | 2005

Computer-implemented methods for performing one or more defect-related functions

Mark Dishner; Chris W. Lee; Sharon Mccauley; Patrick Huet; David Y. Wang


Archive | 2012

Optical metrology tool equipped with modulated illumination sources

Andrei V. Shchegrov; Lawrence D. Rotter; David Y. Wang; Andrei Veldman; Kevin Peterlinz; Gregory Brady; Derrick Shaughnessy


Archive | 2002

Beam splitter/combiner for optical meterology tool

James Lee Hendrix; David Y. Wang; Michael Ellison; Joel Ng


Archive | 2015

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS

David Y. Wang; Klaus Flock; Lawrence D. Rotter; Shankar Krishnan; Johannes D. De Veer; Catalin Filip; Gregory Brady; M. A. Arain; Andrei V. Shchegrov

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