Lawrence D. Rotter | Researchain

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Featured researches published by Lawrence D. Rotter.

Archive | 2002

Measurement system with separate optimized beam paths

David Y. Wang; Lawrence D. Rotter; Jeffrey T. Fanton; Jeffrey E. Mcaninch

Archive | 2002

Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers

Lawrence D. Rotter; David Y. Wang

Archive | 2011

DISCRETE POLARIZATION SCATTEROMETRY

Andrew V. Hill; Amnon Manassen; Daniel Kandel; Vladimir Levinski; Joel L. Seligson; Alexander Svizher; David Y. Wang; Lawrence D. Rotter; Johannes D. De Veer

Archive | 2013

Calibration Of An Optical Metrology System For Critical Dimension Application Matching

Klaus Flock; Lawrence D. Rotter; M. A. Arain

Archive | 2012

Optical metrology tool equipped with modulated illumination sources

Andrei V. Shchegrov; Lawrence D. Rotter; David Y. Wang; Andrei Veldman; Kevin Peterlinz; Gregory Brady; Derrick Shaughnessy

Archive | 2014

Systems for Providing Illumination in Optical Metrology

Gregory Brady; Andrei V. Shchegrov; Lawrence D. Rotter; Derrick Shaughnessy; Anatoly Shchemelinin; Ilya Bezel; M. A. Arain; Anatoly A. Vasiliev; James Andrew Allen; Oleg Shulepov; Andrew V. Hill; Ohad Bachar; Moshe Markowitz; Yaron Ish-shalom; Ilan Sela; Amnon Manassen; Alexander Svizher; Maxim Khokhlov; Avi Abramov; Oleg Tsibulevsky; Daniel Kandel; Mark Ghinovker

Archive | 2015