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Klaus Flock

KLA-Tencor

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Publication

Featured researches published by Klaus Flock.

Archive | 2013

Calibration Of An Optical Metrology System For Critical Dimension Application Matching

Klaus Flock; Lawrence D. Rotter; M. A. Arain

Archive | 2015

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS

David Y. Wang; Klaus Flock; Lawrence D. Rotter; Shankar Krishnan; Johannes D. De Veer; Catalin Filip; Gregory Brady; M. A. Arain; Andrei V. Shchegrov

Archive | 2013

TWO DIMENSIONAL OPTICAL DETECTOR WITH MULTIPLE SHIFT REGISTERS

Klaus Flock

Archive | 2008

Complementary waveplate rotating compensator ellipsometer

Klaus Flock; Jeff T. Fanton

Archive | 2008

Normal incidence ellipsometer with complementary waveplate rotating compensators

Klaus Flock; Jeff T. Fanton

Archive | 2013

Selective diffraction with in-series gratings

Klaus Flock

Archive | 2011

LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM

Guorong V. Zhuang; Shankar Krishnan; Johannes D. De Veer; Klaus Flock; David Y. Wang; Lawrence D. Rotter

Archive | 2014

Broadband And Wide Field Angle Compensator

Lawrence D. Rotter; Klaus Flock; M. A. Arain; David Y. Wang

Archive | 2014

Pulsed laser induced plasma light source

Klaus Flock

Archive | 2012

Selectably configurable multiple mode spectroscopic ellipsometry

Haiming Wang; Guorong V. Zhuang; Shankar Krishnan; Klaus Flock; Johannes D. De Veer

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Collaboration

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Lawrence D. Rotter

KLA-Tencor

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David Y. Wang

Lawrence Livermore National Laboratory

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Shankar Krishnan

KLA-Tencor

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Johannes D. De Veer

KLA-Tencor

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M. A. Arain

University of Florida

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Guorong V. Zhuang

KLA-Tencor

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Jeff T. Fanton

KLA-Tencor

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Andrei V. Shchegrov

KLA-Tencor

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Catalin Filip

KLA-Tencor

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Gregory Brady

KLA-Tencor

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