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Detlef Michelsson

Leica Microsystems

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Publication

Featured researches published by Detlef Michelsson.

Archive | 2004

Method, device and software for the optical inspection of a semi-conductor substrate

Detlef Michelsson

Archive | 2004

Verfahren, Vorrichtung und Software zur optischen Inspektion eines Halbleitersubstrats

Detlef Michelsson

Archive | 2004

Method for inspection of a wafer

Albert Kreh; Henning Backhauss; Detlef Michelsson

Archive | 2004

Method and apparatus for scanning a semiconductor wafer

Detlef Michelsson

Archive | 2005

Method for inspecting a wafer

Joerg Richter; Detlef Michelsson

Archive | 2006

Method for detecting defects in images

Detlef Michelsson; Steffen Gerlach; Bernd Jungmann

Archive | 2006

Visual inspection method for processed boundary edges of e.g. semiconductor wafers, involves taking picture of boundary area of disk-shaped object and showing image, enlarged view and total view of object in different display windows

Gert Weniger; Henning Backhauss; Detlef Michelsson

Archive | 2004

Verfahren und Vorrichtung zur Untersuchung von Halbleiterwafern unter Berücksichtigung des Die-/SAW-Designs

Detlef Michelsson

Archive | 2004

Method and apparatus for examining semiconductor wafers in a context of die/SAW design

Detlef Michelsson

Archive | 2006

Method of detecting incomplete edge bead removal from a disk-like object

Detlef Michelsson; Henning Backhauss; Gert Weniger

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Collaboration

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Bernd Jungmann

Leica Microsystems

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Henning Backhauss

Leica Microsystems

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Steffen Gerlach

Leica Microsystems

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Gert Weniger

Leica Microsystems

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Thin Van Luu

Leica Microsystems

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Albert Kreh

Leica Microsystems

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Joerg Richter

Leica Microsystems

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