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Albert Kreh

Leica Microsystems

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Publication

Featured researches published by Albert Kreh.

Archive | 2005

Method and system for inspecting a wafer

Henning Backhauss; Albert Kreh

Archive | 2004

Apparatus for inspection of a wafer

Albert Kreh; Henning Backhauss

Archive | 2004

Apparatus for wafer inspection

Albert Kreh; Henning Backhauss

Archive | 2005

Method for inspecting a wafer

Paul Jung; Albert Kreh; Henning Backhauss

Archive | 2004

Autofocus module for microscope-based systems

Albert Kreh

Archive | 2004

Vorrichtung zur Wafer-Inspektion

Henning Backhauss; Albert Kreh

Archive | 2004

Apparatus, method, and computer program for wafer inspection

Albert Kreh; Henning Backhauss

Archive | 2005

Method and system for inspecting wafer

Henning Backhauss; Albert Kreh; クレー アルベルト; バックハウス ヘニング

Archive | 2004

Method and device for inspecting a wafer

Albert Kreh; Henning Backhauss

Archive | 2005

Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset

Paul-Gottfried Jung; Albert Kreh; Henning Backhauss

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Collaboration

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Henning Backhauss

Leica Microsystems

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René Schenck

Leica Microsystems

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Detlef Michelsson

Leica Microsystems

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Paul Jung

Leica Microsystems

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Christof Krampe-Zadler

Leica Microsystems

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Gerhard Hoppen

Leica Microsystems

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Lambert Danner

Leica Microsystems

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Michael Heiden

Leica Microsystems

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Wolfgang Sulik

Leica Microsystems

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Christof Krampe-Zadler

Leica Microsystems

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