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Gert Weniger

Leica Microsystems

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Publication

Featured researches published by Gert Weniger.

Archive | 2006

Visual inspection method for processed boundary edges of e.g. semiconductor wafers, involves taking picture of boundary area of disk-shaped object and showing image, enlarged view and total view of object in different display windows

Gert Weniger; Henning Backhauss; Detlef Michelsson

Archive | 2006

Method of detecting incomplete edge bead removal from a disk-like object

Detlef Michelsson; Henning Backhauss; Gert Weniger

Archive | 2005

Imperfect edge beads detecting method for disk shaped object e.g. wafer, involves specifying markings in boundary region of reference object, where inspection of object is limited to position of markings specified in object

Henning Backhauss; Detlef Michelsson; Gert Weniger

Archive | 2006

Apparatus and method for recovery of a system for disc-shaped objects

Gert Weniger

Archive | 2004

Method for automatic focusing an imaging optical system on the surface of a sample

Thomas Iffland; Gert Weniger; Joachim Wienecke

Archive | 2004

Verfahren zur automatischen Fokussierung

Thomas Iffland; Gert Weniger; Joachim Wienecke

Archive | 2004

Method for automatic focusing

Thomas Iffland; Gert Weniger; Joachim Wienecke

Archive | 2006

Disk-shaped object e.g. wafer processing system recovery apparatus, has input unit for resetting overhead hoist transportation, when placing and lifting of front opening unified pod with object is stopped by interruption of light barrier

Gert Weniger

Archive | 2006

Apparatus and process for placing a FOUP on a loadport

Gert Weniger

Archive | 2006

Handling system for FOUPs especially for semiconductor wafer processing has a loading port provided with a holding facility to store aligned FOUPs without processing

Gert Weniger

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Collaboration

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Joachim Wienecke

Leica Microsystems

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Thomas Iffland

Leica Microsystems

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Detlef Michelsson

Leica Microsystems

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Henning Backhauss

Leica Microsystems

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