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Dinesh Chopra

Micron Technology

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Publication

Featured researches published by Dinesh Chopra.

Archive | 1999

Tungsten chemical-mechanical polishing process using a fixed abrasive polishing pad and a tungsten layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad

Dinesh Chopra; Scott G. Meikle

Archive | 2000

Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies

Dinesh Chopra

Archive | 2001

Polishing pads and planarizing machines for mechanical and/or chemical-mechanical planarization of microelectronic substrate assemblies

Dinesh Chopra

Archive | 2002

Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads

Dinesh Chopra; Scott G. Meikle

Archive | 2006

Slurry for use in polishing semiconductor device conductive structures that include copper and tungsten and polishing methods

Nishant Sinha; Dinesh Chopra

Archive | 2001

Method and apparatus for controlling chemical interactions during planarization of microelectronic substrates

Dinesh Chopra; Scott G. Meikle

Archive | 2001

Method of forming a metal seed layer for subsequent plating

Terry L. Gilton; Dinesh Chopra

Archive | 2002

Slurry for use with fixed-abrasive polishing pads in polishing semiconductor device conductive structures that include copper and tungsten and polishing methods

Dinesh Chopra; Nishant Sinha

Archive | 2004

Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby

Dinesh Chopra

Archive | 2002

Fixed-abrasive chemical-mechanical planarization of titanium nitride

Dinesh Chopra; Gundu M. Sabde

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Nishant Sinha

Micron Technology

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Scott G. Meikle

Micron Technology

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Scott E. Moore

Micron Technology

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Vishnu K. Agarwal

Micron Technology

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Cem Basceri

Micron Technology

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Kevin G. Donohoe

Micron Technology

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Bradley J. Howard

Micron Technology

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Gundu M. Sabde

Micron Technology

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Terry L. Gilton

Micron Technology

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