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Vishnu K. Agarwal

Micron Technology

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Publication

Featured researches published by Vishnu K. Agarwal.

Archive | 2001

Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers

Vishnu K. Agarwal; Garo J. Derderian; Gurtej S. Sandhu; Weimin M. Li; Mark Visokay; Cem Basceri; Sam Yang

Archive | 2001

Metal oxynitride capacitor barrier layer

Sam Yang; Vishnu K. Agarwal

Archive | 1998

Method of forming capacitors, method of processing dielectric layers, method of forming a DRAM cell

Vishnu K. Agarwal; Garo J. Derderian; Gurtej S. Sandhu

Archive | 2000

Photo-assisted remote plasma apparatus and method

Vishnu K. Agarwal

Archive | 2003

Structurally-stabilized capacitors and method of making of same

Vishnu K. Agarwal; Gurtej S. Sandhu

Archive | 2001

Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machines

Vishnu K. Agarwal; Scott G. Meikle

Archive | 2001

Method and structure for reducing contact aspect ratios

Scott J. Deboer; Vishnu K. Agarwal

Archive | 2001

Method and apparatus for endpointing a chemical-mechanical planarization process

Vishnu K. Agarwal

Archive | 2001

Methods for forming rough ruthenium-containing layers and structures/methods using same

Garo J. Derderian; Vishnu K. Agarwal

Archive | 2002

Semiconductor container structure with diffusion barrier

Vishnu K. Agarwal

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Garo J. Derderian

Micron Technology

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Gurtej S. Sandhu

Micron Technology

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F. Daniel Gealy

Micron Technology

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Sam Yang

Micron Technology

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Cem Basceri

Micron Technology

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Garry A. Mercaldi

Micron Technology

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Mark Visokay

Micron Technology

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Weimin M. Li

Micron Technology

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William A. Stanton

Micron Technology

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Dinesh Chopra

Micron Technology

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