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Kevin G. Donohoe

Micron Technology

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Publication

Featured researches published by Kevin G. Donohoe.

Archive | 1999

Method and apparatus for reducing isolation stress in integrated circuits

Randhir P. S. Thakur; Kevin G. Donohoe; Zhiqiang Wu; Alan R. Reinberg

Archive | 2000

Reduced power DRAM device and method

Eugene H. Cloud; Kie Y. Ahn; Leonard Forbes; Paul A. Farrar; Kevin G. Donohoe; Alan R. Reinberg; David J. McElroy; Luan C. Tran; Joseph E. Geusic

Archive | 2002

Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor

Kevin G. Donohoe; Guy T. Blalock

Archive | 2002

Method and apparatus for improving etch uniformity in remote source plasma reactors with powered wafer chucks

Kevin G. Donohoe

Archive | 2002

Self-aligned PECVD etch mask

Shane J. Trapp; Kevin G. Donohoe

Archive | 2000

Beat frequency modulation for plasma generation

Kevin G. Donohoe; Marvin F. Hagedorn

Archive | 2000

Gas pulsing for etch profile control

Kevin G. Donohoe; David S. Becker

Archive | 1998

Plasma etching methods

Kevin G. Donohoe; Richard L. Stocks

Archive | 1998

Method for pulsed-plasma enhanced vapor deposition

Kevin G. Donohoe; Gurtej S. Sandhu

Archive | 2000

Plasma processing tools dual-source plasma etchers, dual-source plasma etching methods, and methods of forming planar coil dual-source plasma etchers

Kevin G. Donohoe; Guy T. Blalock

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Guy T. Blalock

Micron Technology

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Alan R. Reinberg

Micron Technology

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David S. Becker

Micron Technology

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Richard L. Stocks

Micron Technology

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Joseph E. Geusic

Micron Technology

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Cem Basceri

Micron Technology

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Dinesh Chopra

Micron Technology

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Mirzafer Abatchev

Micron Technology

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Randhir P. S. Thakur

Micron Technology

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Werner Juengling

Micron Technology

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