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Dive into the research topics where Donald L. Westmoreland is active.

Publication


Featured researches published by Donald L. Westmoreland.


Archive | 2002

Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides

Brian A. Vaartstra; Donald L. Westmoreland


Archive | 2004

Deposition methods using heteroleptic precursors

Brian A. Vaartstra; Donald L. Westmoreland; Eugene P. Marsh; Stefan Uhlenbrock


Archive | 2006

Plasmaless dry contact cleaning method using interhalogen compounds

Gurtej S. Sandhu; Donald L. Westmoreland


Archive | 2002

Mixed metal nitride and boride barrier layers

Brian A. Vaartstra; Donald L. Westmoreland


Archive | 1996

Method of wafer cleaning, and system and cleaning solution regarding same

Li Li; Donald L. Westmoreland; Richard C. Hawthorne; Kevin J. Torek


Archive | 1997

Slurry with chelating agent for chemical-mechanical polishing of a semiconductor wafer and methods related thereto

Gurtej S. Sandhu; Donald L. Westmoreland; Daniel A. Koos


Archive | 2002

Vapor delivery system for solid precursors and method regarding same

David R. Atwell; Donald L. Westmoreland


Archive | 1998

System for wafer cleaning

Li Li; Donald L. Westmoreland; Richard C. Hawthorne; Kevin J. Torek


Archive | 1993

Method and appartus for subliming precursors

Gurtej S. Sandhu; Scott G. Meikle; Donald L. Westmoreland


Archive | 2010

Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces

Dan B. Millward; Donald L. Westmoreland; Gurtej S. Sandhu

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