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Stefan Uhlenbrock

Micron Technology

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Publication

Featured researches published by Stefan Uhlenbrock.

Archive | 2002

Systems and methods for forming strontium-and/or barium-containing layers

Brian A. Vaartstra; Stefan Uhlenbrock

Archive | 2004

Deposition methods using heteroleptic precursors

Brian A. Vaartstra; Donald L. Westmoreland; Eugene P. Marsh; Stefan Uhlenbrock

Archive | 2000

Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same

Eugene P. Marsh; Stefan Uhlenbrock

Archive | 1999

Methods for preparing ruthenium and osmium compounds

Stefan Uhlenbrock; Brian A. Vaartstra

Archive | 1998

Methods for forming rhodium-containing layers such as platinum-rhodium barrier layers

Stefan Uhlenbrock; Eugene P. Marsh

Archive | 2001

Process for low temperature atomic layer deposition of RH

Eugene P. Marsh; Stefan Uhlenbrock

Archive | 1999

Chemical vapor deposition methods utilizing ionic liquids

Stefan Uhlenbrock

Archive | 2004

Methods and apparatus for forming rhodium-containing layers

Stefan Uhlenbrock; Eugene P. Marsh

Archive | 2001

Chemical vapor deposition methods and apparatus

Stefan Uhlenbrock

Archive | 2002

Process for direct deposition of ALD RhO2

Eugene P. Marsh; Stefan Uhlenbrock

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Collaboration

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Eugene P. Marsh

Micron Technology

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Brian A. Vaartstra

Micron Technology

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Timothy A. Quick

Micron Technology

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Donald L. Westmoreland

Micron Technology

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Daniel Millward

Micron Technology

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Brenda D. Kraus

Micron Technology

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Garo J. Derderian

Micron Technology

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Sumeet C. Pandey

Micron Technology

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Chet Carter

University of Arizona

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John Smythe

Micron Technology

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