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Anil K. Pant

Lam Research

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Publication

Featured researches published by Anil K. Pant.

Archive | 1997

Sensors for a linear polisher

Anil K. Pant; Joseph R. Breivogel; Douglas W. Young; Rahul Jairath; Erik H. Engdahl

Archive | 1996

Control of chemical-mechanical polishing rate across a substrate surface

Anil K. Pant; Douglas W. Young; Anthony S. Meyer; Konstantin Volodarsky; David Edwin Weldon

Archive | 1997

Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher

Anil K. Pant; Joseph R. Breivogel; Douglas W. Young; Robert M. Rivera

Archive | 1998

Apparatus and method for film thickness measurement integrated into a wafer load/unload unit

Michael Labunsky; Andrew J. Nagengast; Anil K. Pant

Archive | 1998

Integrated pad and belt for chemical mechanical polishing

Anil K. Pant; Rahul Jairath; Kamal Mishra; Saket Chadda; Wilbur C. Krusell

Archive | 1997

Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing

Anil K. Pant; Douglas W. Young; Joseph R. Breivogel; Konstantin Volodarski; Leon Volfovski

Archive | 2001

Method and apparatus for polishing semiconductor wafers

Edward T. Ferri; Randall L. Green; Anil K. Pant

Archive | 1998

Apparatus and method for performing end point detection on a linear planarization tool

Brian Thornton; Andrew J. Nagengast; Robert G. Boehm; Anil K. Pant; Wilbur C. Krusell

Archive | 2000

Method and apparatus for stabilizing the process temperature during chemical mechanical polishing

Robert G. Boehm; Anil K. Pant; Wilbur C. Krusell; Erik H. Engdahl

Archive | 1998

Use of zeta potential during chemical mechanical polishing for end point detection

Wilbur C. Krusell; Andrew J. Nagengast; Anil K. Pant

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Wilbur C. Krusell

Lam Research

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Andrew J. Nagengast

Lam Research

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Rahul Jairath

Lam Research

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Douglas W. Young

Lam Research

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Brian Thornton

Lam Research

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Erik H. Engdahl

Lam Research

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Joseph R. Breivogel

Lam Research

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Kamal Mishra

Lam Research

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Robert G. Boehm

Lam Research

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Saket Chadda

Lam Research

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