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Eiji Setoyama

Hitachi

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Publication

Featured researches published by Eiji Setoyama.

Archive | 1990

Thin film deposition system

Eiji Setoyama; Mitsuhiro Kamei

Archive | 1990

Film forming system using high frequency power and power supply unit for the same

Eiji Setoyama; Mitsuhiro Kamei

Archive | 1999

Plasma processing apparatus and method of cleaning the apparatus

Eiji Setoyama; Kouji Ishiguro; Hajime Murakami; Hirofumi Seki

Archive | 1988

Magnetron sputter apparatus and method for forming films by using the same apparatus

Yukio Nakagawa; Kenichi Natsui; Youichi Ohshita; Tadashi Sato; Eiji Setoyama; Mitsuhiro Kamei

Archive | 1998

Plasma processing apparatus with a dielectric body in the waveguide

Hirofumi Seki; Satoshi Ichimura; Satoshi Takemori; Eiji Setoyama; Kouji Ishiguro; Yasuhiro Mochizuki; Sensuke Okada; Hajime Murakami

Archive | 1990

Sputtering apparatus, device for exchanging target and method for the same

Mitsuhiro Kamei; Eiji Setoyama

Archive | 1990

Vacuum treatment apparatus and vacuum treatment method

Shigeru Tanaka; Eiji Setoyama; Shinzou Oikawa; Sigeki Yamamura

Archive | 1989

Sputtering apparatus for forming thin films

Eiji Setoyama; Mitsuhiro Kamei; Yasunori Ohno

Archive | 1988

Sputtering apparatus for production of thin films of magnetic materials

Mitsuhiro Kamei; Eiji Setoyama; Shinzou Oikawa

Archive | 1996

Multi-chamber sputtering apparatus

Mitsuhiro Kamei; Eiji Setoyama; Satoshi Umehara

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Collaboration

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Mitsuhiro Kamei

Hitachi

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Satoshi Umehara

Hitachi

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Tadashi Sato

Hitachi

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Hirofumi Seki

Hitachi

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Kenichi Natsui

Hitachi

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Youichi Ohshita

Hitachi

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Yukio Nakagawa

Hitachi

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Satoshi Takemori

Hitachi

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Hajime Murakami

Hitachi

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Katsunori Nakajima

Hitachi

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