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Mitsuhiro Kamei

Hitachi

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Publication

Featured researches published by Mitsuhiro Kamei.

Archive | 1990

Thin film deposition system

Eiji Setoyama; Mitsuhiro Kamei

Archive | 1990

Film forming system using high frequency power and power supply unit for the same

Eiji Setoyama; Mitsuhiro Kamei

Archive | 1988

Magnetron sputter apparatus and method for forming films by using the same apparatus

Yukio Nakagawa; Kenichi Natsui; Youichi Ohshita; Tadashi Sato; Eiji Setoyama; Mitsuhiro Kamei

Archive | 1990

Sputtering apparatus, device for exchanging target and method for the same

Mitsuhiro Kamei; Eiji Setoyama

Archive | 1997

Active-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atoms

Katsunori Nakajima; Kenichi Onisawa; Kenichi Chahara; Mitsuhiro Kamei

Archive | 1989

Sputtering apparatus for forming thin films

Eiji Setoyama; Mitsuhiro Kamei; Yasunori Ohno

Archive | 1988

Sputtering apparatus for production of thin films of magnetic materials

Mitsuhiro Kamei; Eiji Setoyama; Shinzou Oikawa

Archive | 1996

Multi-chamber sputtering apparatus

Mitsuhiro Kamei; Eiji Setoyama; Satoshi Umehara

Vacuum | 1998

Uniformity improvement in dc magnetron sputtering deposition on a large area substrate

Tomoyuki Seino; Y Kawakubo; Katsunori Nakajima; Mitsuhiro Kamei

Archive | 2001

Sputtering system, sputtering support system and sputtering control method

Yoshihiko Nagamine; Yoshiya Higuchi; Tadashi Sato; Tomoyuki Seino; Mitsuhiro Kamei

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Collaboration

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Eiji Setoyama

Hitachi

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Satoshi Umehara

Hitachi

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Tadashi Sato

Hitachi

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Kenichi Natsui

Hitachi

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Tomoyuki Seino

Hitachi

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Youichi Ohshita

Hitachi

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Yukio Nakagawa

Hitachi

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Katsunori Nakajima

Hitachi

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Kenichi Chahara

Hitachi

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Kenichi Onisawa

Hitachi

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