Mitsuhiro Kamei

Thin film deposition system

Film forming system using high frequency power and power supply unit for the same

Magnetron sputter apparatus and method for forming films by using the same apparatus

Sputtering apparatus, device for exchanging target and method for the same

Active-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atoms

Sputtering apparatus for forming thin films

Sputtering apparatus for production of thin films of magnetic materials

Multi-chamber sputtering apparatus

Uniformity improvement in dc magnetron sputtering deposition on a large area substrate

Sputtering system, sputtering support system and sputtering control method