Elisabeth Blanquet

PEALD ZrO2 Films Deposition on TiN and Si Substrates

a STMicroelectronics 850 rue Jean Monnet 38926 Crolles, France. b SIMaP, Grenoble-INP-CNRS-UJF, 1130 rue de la piscine 38402 Saint Martin d’Heres, France. c CMTC, Grenoble-INP, 1260 rue de la piscine 38402 Saint Martin d’Heres, France. d ESRF 6 rue Jules Horowitz 38043 Grenoble, France. e CEA-LETI, Minatec 17 rue des Martyrs 38054 Grenoble, France. f LPCML, Universite Lyon 1 UMR 5620, CNRS, 10 rue Andre-Marie Ampere 69622 Villeurbanne, France.

Thermodynamics Simulations Applied to Gas-Solid Materials Fabrication Processes

The development and the design of materials and/or the processes of their fabrication are generally very time consumer and with expensive operations. Various methods of development can be conceived. Often, empirical approaches are adopted: the choice of the experimental parameters is established either on technological or commercial criteria, the optimization being the results of a “trial and error” approach, or on the results of design of experiments (DOE) approach targeted at a property of a material or a parameter of a very particular process. Another approach is to use process modeling: to simulate the process by a more or less simplified model. The modeling of gas-solid materials fabrication processes brings together several physical and chemical fields with variable complexity, starting from thermodynamics andor kinetics studies up to the mass and heat transport coupled with databases and with thermodynamic and/or kinetics transport properties.