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Emmanuel P. Guidotti

Tokyo Electron

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Publication

Featured researches published by Emmanuel P. Guidotti.

Archive | 2003

Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma

Takenao Nemoto; Emmanuel P. Guidotti; Gert J. Leusink

Archive | 1998

Method of eliminating edge effect in chemical vapor deposition of a metal

Chantal Arena; Ronald T. Bertram; Emmanuel P. Guidotti; Joseph T. Hillman

Archive | 2004

Multi-tray film precursor evaporation system and thin film deposition system incorporating same

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa

Archive | 2004

Replaceable precursor tray for use in a multi-tray solid precursor delivery system

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa

Archive | 2004

Method for preparing solid precursor tray for use in solid precursor evaporation system

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa; Sandra G. Malhotra; Fenton McFeely; Robert R. Young

Archive | 1997

Method of improving surface morphology and reducing resistivity of chemical vapor deposition-metal films

Chantal Arena; Ronald Thomas Bertram; Emmanuel P. Guidotti; Joseph T. Hillman

Archive | 2005

METHOD AND PROCESSING SYSTEM FOR CONTROLLING A CHAMBER CLEANING PROCESS

Emmanuel P. Guidotti

Archive | 2006

Film precursor evaporation system and method of using

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa; Tadahiro Ishizaka

Archive | 2006

Film precursor tray for use in a film precursor evaporation system and method of using

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa; Tadahiro Ishizaka

Archive | 2005

Method and system for improved delivery of a precursor vapor to a processing zone

Emmanuel P. Guidotti; Kenji Suzuki; Gerrit J. Leusink; F. R. McFeely

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Gerrit J. Leusink

Tokyo Electron

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Kenji Suzuki

Tokyo Electron

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Daisuke Kuroiwa

Tokyo Electron

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Masamichi Hara

Tokyo Electron

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Chantal Arena

Tokyo Electron

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Joseph T. Hillman

Tokyo Electron

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F. R. McFeely

IBM

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Robert R. Young

Tokyo Electron

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Ronald T. Bertram

Tokyo Electron

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Tadahiro Ishizaka

Tokyo Electron

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