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Gerrit J. Leusink

Tokyo Electron

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Publication

Featured researches published by Gerrit J. Leusink.

Archive | 1997

Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions

Stanislaw Kopacz; Douglas Arthur Webb; Gerrit J. Leusink; Rene E. Leblanc; Michael S. Ameen; Joseph T. Hillman; Robert F. Foster; Robert C. Rowan

Archive | 2010

Semiconductor device containing a buried threshold voltage adjustment layer and method of forming

Robert D. Clark; Gerrit J. Leusink

Archive | 2001

Inductively-coupled plasma processing system

Jozef Brcka; John Drewery; Michael Grapperhaus; Gerrit J. Leusink; Glyn Reynolds; Mirko Vukovic; Tugrul Yasar

Archive | 2001

Immersed inductively—coupled plasma source

Jozef Brcka; John Drewery; Michael Grapperhaus; Gerrit J. Leusink; Glyn Reynolds; Mirko Vukovic; Tugrul Yasar

Archive | 2004

Multi-tray film precursor evaporation system and thin film deposition system incorporating same

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa

Archive | 2004

Replaceable precursor tray for use in a multi-tray solid precursor delivery system

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa

Archive | 1998

Apparatus and method for electrically isolating an electrode in a PECVD process chamber

Gerrit J. Leusink; Michael Ward; Tayler Bao; Jerry Yeh; Joseph T. Hillman; Tugrul Yasar

Archive | 2005

Method and system for forming a high-k dielectric layer

Cory Wajda; Masanobu Igeta; Gerrit J. Leusink

Archive | 2004

Method for preparing solid precursor tray for use in solid precursor evaporation system

Kenji Suzuki; Emmanuel P. Guidotti; Gerrit J. Leusink; Masamichi Hara; Daisuke Kuroiwa; Sandra G. Malhotra; Fenton McFeely; Robert R. Young

Archive | 2000

Method for single chamber processing of PECVD-Ti and CVD-TiN films for integrated contact/barrier applications in IC manufacturing

Gerrit J. Leusink; Michael Ward; Michael S. Ameen; Joseph T. Hillman

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Emmanuel P. Guidotti

Tokyo Electron

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Kenji Suzuki

Tokyo Electron

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Daisuke Kuroiwa

Tokyo Electron

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Masamichi Hara

Tokyo Electron

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Kandabara Tapily

Tokyo Electron

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Cory Wajda

Tokyo Electron

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Joseph T. Hillman

Tokyo Electron

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Robert D. Clark

Tokyo Electron

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Toshio Hasegawa

Tokyo Electron

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Jozef Brcka

Tokyo Electron

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