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Ernst Keller

Applied Materials

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Publication

Featured researches published by Ernst Keller.

Archive | 2002

Flexibly suspended gas distribution manifold for plasma chamber

John M. White; Ernst Keller; Wendell T. Blonigan

Archive | 2001

Suspended gas distribution manifold for plasma chamber

Ernst Keller; Quanyuan Shang

Archive | 2003

Suspended gas distribution plate

John M. White; Ernst Keller; Wendell T. Blonigan

Archive | 2005

Diffuser gravity support

Ernst Keller; John M. White; Robin L. Tiner; Jiri Kucera; Soo Young Choi; Beom Soo Park; Michael Starr

Archive | 1999

Substrate transfer shuttle

John M. White; Norman L. Turner; Robin L. Tiner; Ernst Keller; Shinichi Kurita; Wendell T. Blonigan; David E. Berkstresser

Archive | 2006

Rf current return path for a large area substrate plasma reactor

Wendell T. Blonigan; Ernst Keller; Carl A. Sorensen

Archive | 2005

PECVD susceptor support construction

Shinichi Kurita; Ernst Keller; John M. White

Archive | 2006

GAS SEALING SKIRT FOR SUSPENDED SHOWERHEAD IN PROCESS CHAMBER

Ernst Keller

Archive | 2006

Suspension for showerhead in process chamber

Ernst Keller

Archive | 2001

Susceptor shaft vacuum pumping

Sanjay Yadav; Quanyuan Shang; Ernst Keller; Wei Chang

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John M. White

Applied Materials

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Wendell T. Blonigan

Applied Materials

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Jiri Kucera

Applied Materials

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Michael Starr

Applied Materials

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Quanyuan Shang

Applied Materials

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Robin L. Tiner

Applied Materials

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Beom Soo Park

Applied Materials

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Sanjay Yadav

Applied Materials

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Shinichi Kurita

Applied Materials

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Soo Young Choi

Applied Materials

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