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Robin L. Tiner

Applied Materials

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Publication

Featured researches published by Robin L. Tiner.

Archive | 2004

Plasma uniformity control by gas diffuser hole design

Soo Young Choi; John M. White; Qunhua Wang; Li Hou; Ki Woon Kim; Shinichi Kurita; Tae Kyung Won; Suhail Anwar; Beom Soo Park; Robin L. Tiner

Archive | 2005

Plasma uniformity control by gas diffuser curvature

Soo Young Choi; Beom Soo Park; John M. White; Robin L. Tiner

Archive | 2005

Diffuser gravity support

Ernst Keller; John M. White; Robin L. Tiner; Jiri Kucera; Soo Young Choi; Beom Soo Park; Michael Starr

Archive | 1998

Method and apparatus for substrate transfer and processing

John M. White; Wendell T. Blonigan; Robin L. Tiner; Shinichi Kurita

Archive | 1999

Substrate transfer shuttle

John M. White; Norman L. Turner; Robin L. Tiner; Ernst Keller; Shinichi Kurita; Wendell T. Blonigan; David E. Berkstresser

Archive | 2007

Heating and cooling of substrate support

John M. White; Robin L. Tiner

Archive | 2010

RF bus and RF return bus for plasma chamber electrode

Carl A. Sorensen; Jozef Kudela; Robin L. Tiner; Suhail Anwar; John M. White

Archive | 2004

RF grounding of cathode in process chamber

John M. White; Robin L. Tiner; Beom Soo Park; Wendell T. Blonigan

Archive | 2010

Ground return for plasma processes

Soo Young Choi; Robin L. Tiner; Shinichi Kurita; John M. White; Carl A. Sorensen; Jeffrey A. Kho; Suhail Anwar; Makoto Inagawa; Gaku Furuta

Archive | 2009

Rf return path for large plasma processing chamber

Carl A. Sorensen; John M. White; Jozef Kudela; Jonghoon Baek; Jriyan Jerry Chen; Steve McPherson; Soo Young Choi; Robin L. Tiner

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John M. White

Applied Materials

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Soo Young Choi

Applied Materials

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Suhail Anwar

Applied Materials

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Shinichi Kurita

Applied Materials

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Beom Soo Park

Applied Materials

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Gaku Furuta

Applied Materials

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Qunhua Wang

Applied Materials

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Carl A. Sorensen

Applied Materials

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Wendell T. Blonigan

Applied Materials

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Young Jin Choi

Applied Materials

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