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Fiolka Damian

Carl Zeiss AG

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Publication

Featured researches published by Fiolka Damian.

Archive | 2006

Filtereinrichtung für die Kompensation einer asymmetrischen Pupillenausleuchtung

Fiolka Damian; Maul Manfred

Archive | 2009

Verfahren und Vorrichtung zur Überwachung von Mehrfachspiegelanordnungen, optische Anordnung mit einer derartigen Vorrichtung sowie mit einer zweiten Mehrfachspiegelanordnung zum Ein- und Ausschalten einer ersten Mehrfachspiegelanordnung sowie Beleuchtungsoptik für eine Projektionsbelichtungsanlage mit einer derartigen Vorrichtung

Deguenther Markus; Patra Michael; Layh Michael; Wangler Johannes; Maul Manfred; Fiolka Damian

Archive | 2006

Projection exposure apparatus

Fiolka Damian

Archive | 2008

Illumination system of microlithographic projection exposure apparatus

Fiolka Damian; Walldorf Daniel; Saenger Ingo; ダニエル ヴァルドルフ; インゴ ゼンガー; ダミアン フィオルカ

Archive | 2004

Polarisationsoptimiertes Axiconsystem und Beleuchtungssystem mit einem solchen Axiconsystem

Fuerter Gerhard; Singer Wolfgang; Maul Manfred; Kohl Alexander; Fiolka Damian

Archive | 2008

Lighting device for microlithographic projection exposure system, has optical element adjusting polarization conditions of radiations, where conditions are different from each other and radiations are deflected in different directions

Fiolka Damian; Weis Gundula

Archive | 2007

OPTICAL SYSTEM OF ILLUMINATION DEVICE OF PROJECTION EXPOSURE APPARATUS

Schuster Karl Heinz; Hartmaier Juergen; Maul Manfred; Schmerek Dieter; Mueller Detlef; Hahnemann Otto; Marianek Frank; Weiss Gundula; Fiolka Damian

Archive | 2007

Polarizers for illumination system of a microlithographic projection lighting unit as for integrated circuits has polarization-selective beam dividing layers alternately inclined to optical axis

Walter Markus; Fiolka Damian; Pazidis Alexandra

Archive | 2003

Sensor zur Strahlungsenergiebestimmung und Verwendung hierfür

Fiolka Damian

Archive | 2006

POLARIZED RADIATION FOR LITHOGRAPHIC DEVICE AND METHOD OF MANUFACTURING DEVICE

Wagner Christiane; De Boeij Wilhelmus Petrus; Heil Tilmann; Fiolka Damian; De Jonge Roel

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Collaboration

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Maul Manfred

Carl Zeiss AG

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Hartmaier Juergen

Carl Zeiss AG

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Totzeck Michael

Carl Zeiss AG

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Baier Juergen

Carl Zeiss AG

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De Boeij Wilhelmus Petrus

Carl Zeiss AG

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Deguenther Markus

Carl Zeiss AG

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Dittmann Olaf

Carl Zeiss AG

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Heil Tilmann

Carl Zeiss AG

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Layh Michael

Carl Zeiss AG

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Marianek Frank

Carl Zeiss AG

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