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Deguenther Markus

Carl Zeiss AG

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Publication

Featured researches published by Deguenther Markus.

Archive | 2007

Field illumination system for microlithographic projection exposure system, has illumination angle variation device influencing intensity and/or phase of light so that intensity contribution of raster units to total intensity is varied

Deguenther Markus; Layh Michael

Archive | 2009

Verfahren und Vorrichtung zur Überwachung von Mehrfachspiegelanordnungen, optische Anordnung mit einer derartigen Vorrichtung sowie mit einer zweiten Mehrfachspiegelanordnung zum Ein- und Ausschalten einer ersten Mehrfachspiegelanordnung sowie Beleuchtungsoptik für eine Projektionsbelichtungsanlage mit einer derartigen Vorrichtung

Deguenther Markus; Patra Michael; Layh Michael; Wangler Johannes; Maul Manfred; Fiolka Damian

Archive | 2008

Illumination optics for use in microlithography projection illumination system, has place and time-dissolved detection device arranged such that device detects light intensity distribution based on light intensity distribution in plane

Patra Michael; Deguenther Markus; Layh Michael; Wangler Johannes; Maul Manfred

Archive | 2003

Blende für eine integratoreinheit

Wangler Johannes; Deguenther Markus

Archive | 2017

ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY AND HOLLOW WAVEGUIDE COMPONENT THEREFOR

Deguenther Markus; Stammler Thomas

Archive | 2013

Messvorrichtung zum Vermessen einer Beleuchtungseigenschaft

Arnz Michael; Deguenther Markus

Archive | 2005

Lighting equipment of microlithographic projection lighting plant, used for producing microstructurized device, e.g. highly integrated circuit on silicon wafer, has mirror in objective on and parallel to optical axis

Singer Wolfgang; Deguenther Markus; Kuerz Birgit; Egger Rafael; Wangler Johannes

Archive | 2017

FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY

Deguenther Markus; Patra Michael

Archive | 2015

Optical system of a microlithographic projection exposure apparatus

Deguenther Markus; Korb Thomas

Archive | 2013

Optical elements, optical arrangement and system

Fiolka Damian; Deguenther Markus

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Wangler Johannes

Carl Zeiss AG

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Layh Michael

Carl Zeiss AG

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Maul Manfred

Carl Zeiss AG

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Patra Michael

Carl Zeiss AG

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Singer Wolfgang

Carl Zeiss AG

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Fiolka Damian

Carl Zeiss AG

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Kuerz Birgit

Carl Zeiss AG

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Arnz Michael

Carl Zeiss AG

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Egger Rafael

Carl Zeiss AG

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Korb Thomas

Carl Zeiss AG

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