Fouad Demami
University of Rennes
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Publication
Featured researches published by Fouad Demami.
Materials Science and Engineering | 2009
Fouad Demami; Laurent Pichon; Régis Rogel; Anne-Claire Salaün
Silicon nanowires are processed by using the sidewall spacer formation technique. This technique uses craftily a drawback of anisotropic etching to go beyond optical limits with conventional UV lithography for precision patterns. The final width of the spacer is controlled by the steepness of the etching side and by the uniformity of the wall recovering layer. In our process, a polysilicon layer is deposited by low pressure chemical vapour deposition technique on SiO2 wall network patterned by conventional UV lithography technique. Accurate control of the etching rate of the polysilicon leads to the formation of nanometric size sidewall spacers with a curvature radius below 100nm. Networks of such parallel polysilicon nanowires were electrically tested in function of temperature (530K 300K) with thermal activation EA ~ 0.3 eV
Materials Science and Engineering | 2009
Liang Ni; Fouad Demami; Régis Rogel; Anne-Claire Salaün; Laurent Pichon
Silicon nanowires (SiNWs) are synthesized via the Vapor-Liquid-Solid (VLS) mechanism using gold (Au) as metal catalyst and silane (SiH4) as precursor gas. Au nanoparticles are employed as liquid droplets catalysis during the SiNWs growth performed in a hot wall LPCVD reactor at 480°C and 40 Pa. SiNWs local synthesis at micron scale is demonstrated using classical optical photolithography process. SiNWs grow with high density anchored at the dedicated catalyst islands. This resulting network is used to interconnect two heavily doped polysilicon interdigitated electrodes leading to the formation of electrical resistors in a coplanar structure. Current-voltage (I-V) characteristics highlight a symmetric shape. The temperature dependence of the electrical resistance is activated, with activation energy of 0.47 eV at temperatures greater than 300K.
Sensors and Actuators B-chemical | 2012
Fouad Demami; Liang Ni; Régis Rogel; Anne-Claire Salaün; Laurent Pichon
Procedia Engineering | 2010
Fouad Demami; Liang Ni; Régis Rogel; Anne-Claire Salaün; Laurent Pichon
Semiconductor Science and Technology | 2013
Laurent Pichon; Emmanuel Jacques; Régis Rogel; Anne-Claire Salaün; Fouad Demami
Physica Status Solidi (c) | 2011
Fouad Demami; Régis Rogel; Anne-Claire Salaün; Laurent Pichon
Journées GDR "Nanofils, Nanotubes Semiconducteurs | 2011
Laurent Pichon; Régis Rogel; Anne-Claire Salaün; Emmanuel Jacques; Fouad Demami; Gertrude Godem-Wenga
European Material Research Society | 2011
Fouad Demami; Laurent Pichon; Régis Rogel; Anne-Claire Salaün
Colloque sur l'Enseignement des Technologies et des Sciences de l'Information et des Systèmes, CETSIS-EEA 2011, 23 - 26 octobre 2011, Trois Rivières (Québec), CANADA. | 2011
Laurent Pichon; Fouad Demami; Régis Rogel; Tayeb Mohammed-Brahim
Archive | 2010
Laurent Pichon; Régis Rogel; Hervé Lhermite; Fouad Demami; Liang Ni; Anne Claire Salaun; Hamsakutty Vettikalladi; Laurent Le Coq; Olivier Lafond; M. Himdi