Frank Brüning
Atotech
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Publication
Featured researches published by Frank Brüning.
SID Symposium Digest of Technical Papers | 2011
Simon Bamberg; Birgit Beck; Horst Brüggmann; Frank Brüning; Elisa Langhammer; Christian Lowinski; Michael Merschky; Jörg Schulze; Johannes Etzkorn
Recently the use of Copper as a conductor material for Thin Film Transistor (TFT) structures has received increasing attention in the Flat Panel Display industry [1, 2]. Since sputtering of thick Cu layers has serious disadvantages Flat Panel Display (FPD) manufacturers are considering wet chemical Cu deposition as a viable process alternative. Depending on the required film properties like conductivity and surface roughness either electroless or electrolytical Copper deposition can be applied.
Thin Solid Films | 2011
Ralf Brüning; Bruce Muir; Eric McCalla; Émilie Lempereur; Frank Brüning; Johannes Etzkorn
Thin Solid Films | 2012
Simon Bamberg; Laura K. Perry; Bruce Muir; Alaaedeen Abuzir; Frank Brüning; Ralf Brüning
Thin Solid Films | 2014
Ralf Brüning; Allison Sibley; Tanu Sharma; Delilah A. Brown; Thibault Demay; Frank Brüning; Tobias Bernhard
Archive | 2013
Richard Nichols; Don Jang; Harald Riebel; Frank Brüning
Archive | 2013
Richard Dixon; Jose Pedrosa; Daniel Johnson; Jörg Schulze; Matthias Dammasch; Dave Baron; Frank Brüning; Robin Taylor
Microelectronic Engineering | 2015
Tanu Sharma; Ralf Brüning; Tang Cam Lai Nguyen; Tobias Bernhard; Frank Brüning
Archive | 2014
Frank Brüning; Elisa Langhammer; Michael Merschky; Christian Lowinski; Jörg Schulze; Johannes Etzkorn; Birgit Beck
International Symposium on Microelectronics | 2013
Tobias Bernhard; Simon Bamberg; Frank Brüning; Ralf Brüning; Laurence J. Gregoriades; Tanu Sharma; Delilah A. Brown; M. Klaus; Ch. Genzel
MRS Proceedings | 2012
Ralf Brüning; Laura K. Perry; Bruce Muir; Alaaedeen Abuzir; Simon Bamberg; Wolfgang Friz; Nina Dambrowsky; Frank Brüning
