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Dive into the research topics where Frank Klopf is active.

Publication


Featured researches published by Frank Klopf.


ieee sensors | 2007

A small size high pressure sensor based on metal thin film technology

Arno Stoetzler; D. Dittmann; Ralf Henn; Axel Jasenek; Frank Klopf; A. Scharping; W. Frey; H. P. Didra; M. Metz

In this contribution we present the basic design of the new miniaturized high pressure sensor chip based on metal thin film technology (MFT). The steps of chip fabrication will be addressed, and compared with alternative processes. The product performance will be demonstrated by characterization data.


Archive | 2006

Method for Accelerated Etching of Silicon

Hubert Benzel; Stefan Pinter; Christoph Schelling; Tjalf Pirk; Julian Gonska; Frank Klopf; Christina Leinenbach


Archive | 2005

Micromechanical high-pressure sensor

Ralf Henn; Werner Steiner; Hans-Peter Didra; Philip Cutuli; Frank Klopf


Archive | 2005

Process for plasma-free etching of silicon with etching gas useful in production of deep structures such as through holes or troughs where silicon has one or more regions to be etched as layer on substrate or on substrate itself

Hubert Benzel; Julian Gonska; Frank Klopf; Christina Leinenbach; Stefan Pinter; Tjalf Pirk; Christoph Schelling


Archive | 2016

DEVICE FOR DETERMINING A PRESSURE AND METHOD FOR MANUFACTURING THE SAME

Frank Klopf; Wilhelm Frey; Marc Layer; Juergen Kober


Archive | 2010

Method and device for electrochemical machining of substrates

Frank Klopf; Arno Stoetzler; Juergen Kober


Archive | 2009

Sensor assemblage and method for manufacturing a sensor assemblage

Frank Klopf; Arno Stoetzler; Juergen Kober


Archive | 2017

Sensor Arrangement for Indirect Detection of a Torque of a Rotatably Mounted Shaft

Frank Klopf; Simon Schneider


Archive | 2016

Sensoranordnung zur indirekten Erfassung eines Drehmoments einer rotierbar gelagerten Welle

Frank Klopf; Simon Schneider


Archive | 2016

Messvorrichtung zum Erfassen von Deformationen

Frank Klopf; Simon Schneider; Michael Struchholz; Andreas Traub; Holger Rumpf; Marc Layer; Juergen Kober

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