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Tjalf Pirk

Bosch

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Publication

Featured researches published by Tjalf Pirk.

international conference on optical mems and nanophotonics | 2009

Microscanner using self aligned vertical comb drives in a switched electrode configuration for large static rotation

Joachim Fritz; Stefan Pinter; Christoph Friese; Tjalf Pirk; H. Seidel

We present a microscanner actuated by self aligned vertical comb drives of high aspect ratio, designed for bidirectional static actuation. A stable rotational angle of ±8° is demonstrated at 290V<inf>DC</inf>.

Archive | 2006

Method for Accelerated Etching of Silicon

Hubert Benzel; Stefan Pinter; Christoph Schelling; Tjalf Pirk; Julian Gonska; Frank Klopf; Christina Leinenbach

Archive | 2008

Micro valve, method for producing a micro valve, as well as micro pump

Tjalf Pirk; Michael Stumber

Archive | 2008

Deviation device for a beam of an electromagnetic wave

Tjalf Pirk; Stefan Pinter; Hubert Benzel; Heribert Weber; Michael Krueger; Robert Sattler; Njimonzie Frederic Njikam; Joerg Muchow; Joachim Fritz; Christoph Schelling; Christoph Friese

Archive | 2004

Verfahren zur herstellung eines mikromechanischen bauteils, vorzugsweise für fluidische anwendungen und mikropumpe mit einer pumpmemembran aus einer polysiliciumschicht

Matthias Fuertsch; Hubert Benzel; Stefan Finkbeiner; Stefan Pinter; Frank Fischer; Heiko Stahl; Tjalf Pirk

Archive | 2010

Herstellungsverfahren für ein mikromechanisches Bauteil und Mikromechanisches Bauteil

Stefan Finkbeiner; Christoph Friese; Tjalf Pirk

Archive | 2004

Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer

Matthias Fuertsch; Hubert Benzel; Stefan Finkbeiner; Stefan Pinter; Frank Fischer; Heiko Stahl; Tjalf Pirk

Archive | 2011

Method and Apparatus for Production of a Thin-Film Battery

Tjalf Pirk; Andreas Krauss; Thomas Teuschel; Laura Bohne

Archive | 2008

Method for producing a device including an array of microneedles on a support, and device producible according to this method

Tjalf Pirk; Michael Stumber; Joachim Rudhard; Ando Feyh; Christina Leinenbach; Christian Mauerer

Archive | 2007

Method for production of communicating hollow spaces, involves providing silicon substrate in which first mask and second mask are brought whereby two differently porous layers in silicon substrate are produced by electrochemical corroding

Simon Armbruster; Stefan Pinter; Tjalf Pirk; Frank Schaefer

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Collaboration

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Stefan Pinter

Bosch

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Christoph Friese

Bosch

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Joachim Fritz

Bosch

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Joerg Muchow

Bosch

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Hubert Benzel

Bosch

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Christoph Schelling

Bosch

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Michael Stumber

Bosch

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Ando Feyh

Bosch

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Michael Krueger

Bosch

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Heribert Weber

Bosch

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