Frédéric Peyskens

Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line

PECVD silicon nitride photonic wire waveguides have been fabricated in a CMOS pilot line. Both clad and unclad single mode wire waveguides were measured at λ = 532, 780, and 900 nm, respectively. The dependence of loss on wire width, wavelength, and cladding is discussed in detail. Cladded multimode and singlemode waveguides show a loss well below 1 dB/cm in the 532-900 nm wavelength range. For singlemode unclad waveguides, losses 1 dB/cm were achieved at λ = 900 nm, whereas losses were measured in the range of 1-3 dB/cm for λ = 780 and 532 nm, respectively.

Evanescent excitation and collection of spontaneous Raman spectra using silicon nitride nanophotonic waveguides.

We experimentally demonstrate the use of high contrast, CMOS-compatible integrated photonic waveguides for Raman spectroscopy. We also derive the dependence of collected Raman power with the waveguide parameters and experimentally verify the derived relations. Isopropyl alcohol (IPA) is evanescently excited and detected using single-mode silicon-nitride strip waveguides. We analyze the measured signal strength of pure IPA corresponding to an 819  cm⁻¹ Raman peak due to in-phase C-C-O stretch vibration for several waveguide lengths and deduce a pump power to Raman signal conversion efficiency on the waveguide to be at least 10⁻¹¹  per cm.

Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]

There is a rapidly growing demand to use silicon and silicon nitride (Si3N4) integrated photonics for sensing applications, ranging from refractive index to spectroscopic sensing. By making use of advanced CMOS technology, complex miniaturized circuits can be easily realized on a large scale and at a low cost covering visible to mid-IR wavelengths. In this paper we present our recent work on the development of silicon and Si3N4-based photonic integrated circuits for various spectroscopic sensing applications. We report our findings on waveguide-based absorption, and Raman and surface enhanced Raman spectroscopy. Finally we report on-chip spectrometers and on-chip broadband light sources covering very near-IR to mid-IR wavelengths to realize fully integrated spectroscopic systems on a chip.

Surface Enhanced Raman Spectroscopy Using a Single Mode Nanophotonic-Plasmonic Platform

We demonstrate the generation of Surface Enhanced Raman Spectroscopy (SERS) signals from integrated bowtie antennas, excited and collected by the fundamental TE mode of a single mode silicon nitride waveguide. Due to the integrated nature of this particular single mode SERS probe one can rigorously quantify the complete enhancement process. The Stokes power, generated by a 4-nitrothiophenol-coated antenna and collected into the fundamental TE mode, exhibits an 8 × 106 enhancement compared to the free space Raman scattering of a 4-nitrothiophenol molecule. Furthermore, we present an analytical model which identifies the relevant design parameters and figure of merit for this new SERS-platform. An excellent correspondence is obtained between the theoretically predicted and experimentally observed absolute Raman power. This work paves the way toward a new class of fully integrated lab-on-a-chip systems where the single mode SERS probe can be combined with other photonic, fluidic, or biological functionalities.

Bright and dark plasmon resonances of nanoplasmonic antennas evanescently coupled with a silicon nitride waveguide

In this work we investigate numerically and experimentally the resonance wavelength tuning of different nanoplasmonic antennas excited through the evanescent field of a single mode silicon nitride waveguide and study their interaction with this excitation field. Experimental interaction efficiencies up to 19% are reported and it is shown that the waveguide geometry can be tuned in order to optimize this interaction. Apart from the excitation of bright plasmon modes, an efficient coupling between the evanescent field and a dark plasmonic resonance is experimentally demonstrated and theoretically explained as a result of the propagation induced phase delay.

Efficiency of evanescent excitation and collection of spontaneous Raman scattering near high index contrast channel waveguides

We develop and experimentally verify a theoretical model for the total efficiency η0 of evanescent excitation and subsequent collection of spontaneous Raman signals by the fundamental quasi-TE and quasi-TM modes of a generic photonic channel waveguide. Single-mode silicon nitride (Si3N4) slot and strip waveguides of different dimensions are used in the experimental study. Our theoretical model is validated by the correspondence between the experimental and theoretical absolute values within the experimental errors. We extend our theoretical model to silicon-on-insulator (SOI) and titanium dioxide (TiO2) channel waveguides and study η0 as a function of index contrast, polarization of the mode and the geometry of the waveguides. We report nearly 2.5 (4 and 5) times larger η0 for the fundamental quasi-TM mode when compared to η0 for the fundamental quasi-TE mode of a typical Si3N4 (TiO2 and SOI) strip waveguide. η0 for the fundamental quasi-TE mode of a typical Si3N4, (TiO2 and SOI) slot waveguide is about 7 (22 and 90) times larger when compared to η0 for the fundamental quasi-TE mode of a strip waveguide of the similar dimensions. We attribute the observed enhancement to the higher electric field discontinuity present in high index contrast waveguides.

Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy

We review an on-chip approach for spontaneous Raman spectroscopy and surface-enhanced Raman spectroscopy based on evanescent excitation of the analyte as well as evanescent collection of the Raman signal using complementary metal oxide semiconductor (CMOS)-compatible single mode waveguides. The signal is either directly collected from the analyte molecules or via plasmonic nanoantennas integrated on top of the waveguides. Flexibility in the design of the geometry of the waveguide, and/or the geometry of the antennas, enables optimization of the collection efficiency. Furthermore, the sensor can be integrated with additional functionality (sources, detectors, spectrometers) on the same chip. In this paper, the basic theoretical concepts are introduced to identify the key design parameters, and some proof-of-concept experimental results are reviewed.

Enhancement of Raman scattering efficiency by a metallic nano-antenna on top of a high index contrast waveguide

We theoretically study coupling of dipole radiation into integrated Si3N4 strip waveguides functionalized with a nanoplasmonic antenna. This structure enables efficient coupling of enhanced Raman signals into the fundamental TE-mode of the waveguide.

Lab-on-a-chip Raman sensors outperforming Raman microscopes

We demonstrate that the signal-to-noise ratio and signal collection efficiency in evanescent waveguide-based Raman spectroscopy exceeds that in Raman microscopes. We investigate the effect of silicon-nitride waveguide geometry to further improve the performance.

Waveguide excitation and collection of surface-enhanced Raman scattering from a single plasmonic antenna

Abstract The integration of plasmonic antennas on single-mode silicon nitride waveguides offers great perspective for integrated surface-enhanced Raman spectroscopy (SERS). However, the few reported experimental demonstrations still require multiple plasmonic antennas to obtain a detectable SERS spectrum. Here, we show, for the first time, SERS signal detection by a single nanoplasmonic antenna integrated on a single-mode SiN waveguide. For this purpose, we investigated a backscattering detection scheme in combination with background noise reduction, which allowed an optimization of the signal-to-noise ratio (SNR) of this platform. Furthermore, a comparison with the free-space SERS spectrum of the same antenna shows that the conversion efficiency from pump power to total radiated Stokes power is twice as efficient in the case of waveguide excitation. As such, we explored several important aspects in the optimization of on-chip SERS sensors and experimentally demonstrated the power of exciting nanoplasmonic antennas using the evanescent field of a waveguide. This observation not only is useful for Raman sensing but also could be beneficial for any process involving plasmonic enhancement.