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Fumio Tahara

East Tennessee State University

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Publication

Featured researches published by Fumio Tahara.

Archive | 2005

Method of manufacturing silicon epitaxial wafer

Fumitaka Kume; Tomosuke Yoshida; Ken Aihara; Ryoji Hoshi; Satoshi Tobe; Naohisa Toda; Fumio Tahara

Archive | 2005

Silicon Epitaxial Wafer and Manufacturing Method Thereof

Fumitaka Kume; Tomosuke Yoshida; Ken Aihara; Ryoji Hoshi; Satoshi Tobe; Naohisa Toda; Fumio Tahara

Archive | 2009

SILICON SINGLE CRYSTAL WAFER AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL WAFER, AND METHOD FOR EVALUATING SILICON SINGLE CRYSTAL WAFER

Fumio Tahara; Tsuyoshi Ohtsuki; Takatoshi Nagoya; Kiyoshi Mitani

Archive | 2012

Method for manufacturing silicon single crystal wafer and annealed wafer

Wei Feng Qu; Fumio Tahara; Yuuki Ooi; Shu Sugisawa

Archive | 2005

Silicon epitaxial wafer and process for producing the same

Fumitaka Kume; Tomosuke Yoshida; Ken Aihara; Ryoji Hoshi; Satoshi Tobe; Naohisa Toda; Fumio Tahara

Archive | 2012

Method for detecting crystal defects

Wei Feng Qu; Fumio Tahara; Yuuki Ooi

Archive | 2015

Procédé de traitement thermique d'une tranche de silicium monocristallin

曲 偉峰; Wei Feng Qu; 田原 史夫; Fumio Tahara; 昌弘 櫻田; Masahiro Sakurada; 高橋 修治; Shuji Takahashi

Archive | 2014

SILICON WAFER HEAT TREATMENT METHOD

Wei Feng Qu; Fumio Tahara

Archive | 2013

Procédé de fabrication de plaquette soi

Wei Feng Qu; 曲 偉峰; Fumio Tahara; 田原 史夫; Yuuki Ooi; 裕喜 大井

Archive | 2012

Procédé de production de plaquette de silicium monocristallin et plaquette recuite

Wei Feng Qu; 曲 偉峰; Fumio Tahara; 田原 史夫; Yuuki Ooi; 裕喜 大井; Shu Sugisawa; 修 杉澤

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Collaboration

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Wei Feng Qu

East Tennessee State University

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Yuuki Ooi

East Tennessee State University

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Kiyoshi Mitani

East Tennessee State University

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Tsuyoshi Ohtsuki

East Tennessee State University

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Shu Sugisawa

East Tennessee State University

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Fumitaka Kume

East Tennessee State University

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Ken Aihara

East Tennessee State University

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Naohisa Toda

East Tennessee State University

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Ryoji Hoshi

East Tennessee State University

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Satoshi Tobe

East Tennessee State University

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