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Dive into the research topics where Gamaralalage G. Padmabandu is active.

Publication


Featured researches published by Gamaralalage G. Padmabandu.


Proceedings of SPIE | 2015

Enabling CoO improvement thru green initiatives

Eric Gross; Gamaralalage G. Padmabandu; Richard C. Ujazdowski; Don Haran; Matt Lake; Eric Mason; Walter D. Gillespie

Chipmakers continued pressure to drive down costs while increasing utilization requires development in all areas. Cymer’s commitment to meeting customer’s needs includes developing solutions that enable higher productivity as well as lowering cost of lightsource operation. Improvements in system power efficiency and predictability were deployed to chipmakers’ in 2014 with release of our latest Master Oscillating gas chamber. In addition, Cymer has committed to reduced gas usage, completing development in methods to reduce Helium gas usage while maintaining superior bandwidth and wavelength stability. The latest developments in lowering cost of operations are paired with our advanced ETC controller in Cymer’s XLR 700ix product.


Archive | 1999

Reliable modular production quality narrow-band high REP rate excimer laser

David W. Myers; Herve A. Besaucele; Palash P. Das; Thomas P. Duffey; Alexander I. Ershov; Igor V. Fomenkov; Thomas Hofmann; Richard G. Morton; Richard M. Ness; Peter C. Newman; Robert G. Ozarski; Gamaralalage G. Padmabandu; William N. Partlo; Daniel A. Rothweil; Richard L. Sandstrom; Paul S. Thompson; Richard C. Ujazdowski; Tom A. Watson; R. Kyle Webb; Paolo Zambon


Archive | 2003

Bandwidth control technique for a laser

Igor V. Fomenkov; Armen Kroyan; Jesse D. Buck; Palash P. Das; Richard L. Sandstrom; Frederick G. Erie; John M Algots; Gamaralalage G. Padmabandu


Archive | 2001

FOUR KHz GAS DISCHARGE LASER SYSTEM

Christian J. Wittak; William N. Partlo; Richard L. Sandstrom; Paul C. Melcher; David M. Johns; Robert B. Saethre; Richard M. Ness; Curtis L. Rettig; Robert A. Shannon; Richard C. Ujazdowski; Shahryar Rokni; Scott T. Smith; Stuart L. Anderson; John M Algots; Ronald L. Spangler; Igor V. Fomenkov; Thomas D. Steiger; Jerome A. Emilo; Clay C. Titus; Alex P. Ivaschenko; Paolo Zambon; Gamaralalage G. Padmabandu; Mark S. Branham; Sunjay Phatak; Raymond F. Cybulski


Archive | 2000

Control technique for microlithography lasers

Paolo Zambon; Gamaralalage G. Padmabandu; Tom A. Watson; Palash P. Das


Archive | 1999

Compact high resolution grating spectrometer

Alexander I. Ershov; Gamaralalage G. Padmabandu; Palash P. Das


Archive | 1999

Energy efficient lithography laser

Gamaralalage G. Padmabandu; Palash P. Das; Tom A. Watson; Paolo Zambon


Archive | 2001

Laser bandwidth controlling technology

John M Algots; Jesse D. Buck; Palash P. Das; Frederick G. Erie; Igor V. Fomenkov; Armen Kroyan; Gamaralalage G. Padmabandu; Richard L. Sandstrom; クロイアン アーメン; ヴィ フォーメンコフ アイゴー; ジー パドマバンデュ ガマラーララーグ; ディ バック ジェシー; エム アルゴッツ ジョン; ピー ダス パラシュ; ジー エリー フレデリック; エル サンドストロム リチャード


Archive | 2004

High power laser output beam energy density reduction

Rajasekhar M. Rao; Weiman Zhang; James K. Howey; Gamaralalage G. Padmabandu; Paolo Zambon; Richard L. Sandstrom


Archive | 2017

for deep UV lithography

Alex I. Ershov; Gamaralalage G. Padmabandu; Jeremy D. Tyler; Palash P. Das

Collaboration


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