Richard C. Ujazdowski
Cymer, Inc.
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Publication
Featured researches published by Richard C. Ujazdowski.
Proceedings of SPIE | 2015
Eric Gross; Gamaralalage G. Padmabandu; Richard C. Ujazdowski; Don Haran; Matt Lake; Eric Mason; Walter D. Gillespie
Chipmakers continued pressure to drive down costs while increasing utilization requires development in all areas. Cymer’s commitment to meeting customer’s needs includes developing solutions that enable higher productivity as well as lowering cost of lightsource operation. Improvements in system power efficiency and predictability were deployed to chipmakers’ in 2014 with release of our latest Master Oscillating gas chamber. In addition, Cymer has committed to reduced gas usage, completing development in methods to reduce Helium gas usage while maintaining superior bandwidth and wavelength stability. The latest developments in lowering cost of operations are paired with our advanced ETC controller in Cymer’s XLR 700ix product.
Proceedings of SPIE, the International Society for Optical Engineering | 1997
Tom A. Watson; Richard C. Ujazdowski; Palash P. Das
As applications have evolved out of the research areas, laser beam properties and component lifetimes have become critical to achieving low operating cost in a manufacturing environment. We will discuss the development of a 110 watt KrF laser using an all solid-state pulsed power system. Solid state pulsed power enables a significant reduction in system operating costs by greatly extending the exchange interval of the pulsed power and discharge chamber modules. Beam properties of the laser using both stable and unstable resonator configurations will be discussed.
Archive | 2002
David S. Knowles; Daniel J. W. Brown; Herve A. Besaucele; David W. Myers; Alexander I. Ershov; William N. Partlo; Richard L. Sandstrom; Palash P. Das; Stuart L. Anderson; Igor V. Fomenkov; Richard C. Ujazdowski; Eckehard D. Onkels; Richard M. Ness; Scott T. Smith; William G. Hulburd; Jeffrey Oicles
Archive | 1999
David W. Myers; Herve A. Besaucele; Palash P. Das; Thomas P. Duffey; Alexander I. Ershov; Igor V. Fomenkov; Thomas Hofmann; Richard G. Morton; Richard M. Ness; Peter C. Newman; Robert G. Ozarski; Gamaralalage G. Padmabandu; William N. Partlo; Daniel A. Rothweil; Richard L. Sandstrom; Paul S. Thompson; Richard C. Ujazdowski; Tom A. Watson; R. Kyle Webb; Paolo Zambon
Archive | 1998
David S. Knowles; James H. Azzola; Herve A. Besaucele; Palash P. Das; Alexander I. Ershov; Igor V. Fomenkov; Tibor Juhasz; Robert G. Ozarski; William N. Partlo; Daniel A. Rothweil; Richard L. Sandstrom; Richard C. Ujazdowski; Tom A. Watson; Richard M. Ness
Archive | 2001
Richard C. Ujazdowski; Michael C. Cates; Richard G. Morton; Jean-Marc Hueber; Ross H. Winnick
Archive | 2003
Thomas A. Yager; William N. Partlo; Richard L. Sandstrom; Xiaojiang Pan; John T. Melchior; John M Algots; Matthew Ball; Alexander I. Ershov; Vladimir B. Fleurov; Walter D. Gillespie; Holger K. Glatzel; Leonard Lublin; Elizabeth Marsh; Richard G. Morton; Richard C. Ujazdowski; David J. Warkentin; R. Webb
Archive | 2001
Peter C. Newman; Thomas P. Duffey; William N. Partlo; Richard L. Sandstrom; Paul C. Melcher; David M. Johns; Robert B. Saethre; Vladimir B. Fleurov; Richard M. Ness; Curtis L. Rettig; Robert A. Shannon; Richard C. Ujazdowski; Shahryar Rokni; Xiaojiang J. Pan; Vladimir Kulgeyko; Scott T. Smith; Stuart L. Anderson; John M Algots; Ronald L. Spangler; Igor V. Fomenkov
Archive | 2001
William N. Partlo; Igor V. Fomenkov; Jean-Marc Hueber; Zsolt Bor; Eckehard D. Onkels; Michael C. Cates; Richard C. Ujazdowski; Vladimir B. Fleurov; Dmitri V. Gaidarenko
Archive | 2002
Tom A. Watson; Richard C. Ujazdowski; Alex P. Ivaschenko; Richard L. Sandstrom; Robert A. Shannon; R. Kyle Webb; Frederick A. Palenschat; Thomas Hofmann; Curtis L. Rettig; Richard M. Ness; Paul C. Melcher; Alexander I. Ershov
