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Dive into the research topics where Georg Kraus is active.

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Featured researches published by Georg Kraus.


Archive | 1990

Method of producing micromechanical sensors for the afm/stm profilometry and micromechanical afm/stm sensor head

Thomas Bayer; Johann Greschner; Georg Kraus; Helga Weiss; Olaf Wolter


Archive | 1981

Structure with a silicon body having through openings

Johann Greschner; Georg Kraus; Gerhard E. Schmid


Archive | 1988

PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides

Johann Bartha; Thomas Bayer; Johann Greschner; Georg Kraus; Gerhard Schmid


Archive | 1990

METHOD OF PRODUCING MICROMECHANICAL SENSORS FOR THE AFM/STM PROFILOMETRY

Johann Bartha; Thomas Bayer; Johann Greschner; Georg Kraus; Helga Weiss; Olaf Wolter


Archive | 1995

Method for producing deep vertical structures in silicon substrates

Johann Dr. Bartha; Johann Greschner; Robert Dr. Junginger; Georg Kraus


Archive | 1984

Method of dry copper etching and its implementation

Frank Druschke; Georg Kraus; Ulrich Kuenzel; Wolf D. Ruh; Rolf Schaefer


Archive | 1984

Apparatus comprising a lubricant-coated magnetic disc and a magnetic head, and method of making said apparatus

Annelie Monnich; Michael Dipl.-Phys. Glatzel; Holger Hinkel; Gerhard Kaus; Georg Kraus; Ulrich Dr. Dipl.-Chem. Künzel; Erhard Max


Archive | 1981

Method of making semiconductor device structures by means of ion implantation under a partial pressure of oxygen

Holger Hinkel; Jurgen Kempf; Georg Kraus; Gerhard E. Schmid


Archive | 1983

Plasma reactor for etching and coating substrates

Holger Hinkel; Gerhard Kaus; Georg Kraus; Ulrich Dr. Dipl.-Chem. Künzel; Reinhold Muehl


Archive | 1990

Process for fabricating silicon carbide films with a predetermined stress

Johann Bartha; Thomas Bayer; Johann Greschner; Georg Kraus; Olaf Wolter

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