Gerald Eckstein

A 128 128 CMOS Biosensor Array for Extracellular Recording of Neural Activity

Sensor arrays are a key tool in the field of neuroscience for noninvasive recording of the activity of biological networks, such as dissociated neurons or neural tissue. A high-density sensor array complementary metal–oxide–semiconductor chip is presented with 16 K pixels, a frame rate of 2 kiloframes per second, and a pitch of 7.8 m 7.8 m for imaging of neural activity. The related circuit and system issues as well as process aspects are discussed. A mismatch-canceling calibration circuitry with current mode signal representation is used. Results from first biological experiments are presented, which prove full functionality of the chip.

A 128 /spl times/ 128 CMOS bio-sensor array for extracellular recording of neural activity

A CMOS sensor array for monitoring neural signals of living cells with 128 /spl times/ 128 pixels in a 1 mm/sup 2/ area is described. A standard 0.5 /spl mu/m, 5 V CMOS process extended by top electrodes covered by a relatively thin bio-compatible dielectric is used. Detection circuitry is based on a sensor-MOSFET mismatch-compensating current-mode technique.

Sensor arrays for fully-electronic DNA detection on CMOS

A 16×8 DNA sensor array chip with fully electronic readout is based on an extended CMOS process. Requirements concerning the integration of bio-compatible interface-, sensor- and transducer-materials into a standard-CMOS-environment and circuitry design issues are discussed.

Technology aspects of a CMOS neuro-sensor: back end process and packaging

A CMOS-compatible process is presented which allows to realize sensor arrays for non-invasive, extracellular, high density, long term recording of neural activity. A high-permittivity biocompatible dielectric is used to capacitively couple nerve cell-induced biological signals to the CMOS circuitry-based electronic world. The transducer consists of a multi layer of TiO/sub 2/ and ZrO/sub 2/ and is fabricated in the backend of a 0.5 /spl mu/m standard CMOS technology. Living cells are cultured within a specific package on top of the sensor chip. First measurements reveal proper operation of the chip.

Design And Analysis Of A Capacitive Vibration-To-Electrical Energy Converter With Built-In Voltage

This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. Such a micro-electro-mechanical system (MEMS) based capacitive energy converter is able to provide an output power of 4.28 muW at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s2 (0.2 g). This corresponds to a power density of 79.26 muW/cm 3 based on a typical MEMS die size

Separation and Assembly of DNA‐dispersed Carbon Nanotubes by Dielectrophoresis

Current production methods for single wall carbon nanotubes (SWCNT) yield a mixture of metallic and semiconducting SWCNT, mostly bundled. Recent publications suggested the separation of metallic and semiconducting species by dielectrophoresis (DEP). We demonstrate the enrichment of metallic SWCNT in self‐assembled wires deposited dielectrophoretically from a DNA dispersed suspension by applying resonant Raman spectroscopy. Our modification of the DEP separation process provides compatibility to bionanotechnology assembly approaches by avoiding tensides.

MEMS-basierter piezoelektrischer Energiewandler (MEMS-based Piezoelectric Energy Converter)

Im vorliegenden Beitrag wird ein neuer Ansatz eines MEMS-basierten (Micro-Electro-Mechanical System) piezoelektrischen Energiewandlers vorgestellt. Dieser MEMS-Generator basiert im Wesentlichen auf einer massebeaufschlagten piezoelektrischen Membran, die in der Lage ist, umgebende mechanische Vibrationen in elektrische Energie zu wandeln. Im Folgenden wird ein entsprechender MEMS-Entwurf präsentiert, wobei im Speziellen auf die Optimierung der geometrischen Anordnung des Bauteils eingegangen wird. Darüber hinaus demonstrieren erste Experimente die Funktionsweise des Energiewandlers. Elektrische Messungen zeigen Abhängigkeiten bezüglich elektrischer Last, Schichtstress in der Membran und Elektrodenstruktur. Der typische Frequenzgang eines piezoelektrischen Mikrogenerators wird ebenso vorgestellt. A new approach of a MEMS (Micro-Electro-Mechanical System) power generator based on a piezoelectric membrane is presented. A MEMS design is introduced taking an optimum membrane thickness and a beneficial electrode structure into account. Experiments demonstrate the functionality of the energy converter. Electrical measurements show dependencies regarding electrical load, residual stress within the diaphragm, and electrode design. The frequency response of the device is also presented.