Gon-sub Lee

Effects of hydrogen doping on surface and discharge properties of MgO thin films grown by ion plating

Magnesium oxide (MgO) thin films with a high crystallinity and a preferred (1 1 1) orientation were prepared by an ion plating technique and the effects of hydrogen flow rates on their structural, surface, optical and discharge properties were investigated. Dependence on hydrogen flow rates has a quadratic curve type characteristic with an inflection point at a hydrogen flow rate of 60 sccm. The results indicated that the controlled grain shape and the size of MgO film grown under an optimal hydrogen doping condition affect the surface, microstructure and defect states in the MgO films, resulting in a reduction in the discharge delay time of ac plasma display panels significantly.