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Grace H. Chen

KLA-Tencor

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Publication

Featured researches published by Grace H. Chen.

Archive | 2005

System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface

Evan R. Mapoles; Grace H. Chen; Christopher F. Bevis; David W. Shortt

Archive | 2002

Surface inspection system and method for using photo detector array to detect defects in inspection surface

Evan R. Mapoles; Grace H. Chen; Christopher F. Bevis; David W. Shortt

Archive | 2014

Detecting defects on a wafer using defect-specific and multi-channel information

Kenong Wu; Lisheng Gao; Grace H. Chen; David W. Shortt

Archive | 2012

Enhanced high-speed logarithmic photo-detector for spot scanning system

Ralph C. Wolf; Grace H. Chen; Kai Cao; Jamie Sullivan; Paul J. Donders; Derek Mackay

Archive | 2013

System and method for apodization in a semiconductor device inspection system

Jamie Sullivan; Gary R. Janik; Steve Yifeng Cui; Rex Runyon; Dieter Wilk; Steve Short; Mikhail Haurylau; Qiang Q. Zhang; Grace H. Chen; Robert M. Danen; Suwipin Martono; Shobhit Verma; Wenjian Cai; Meier Brender

Archive | 2011

Region based virtual fourier filter

Lisheng Gao; Kenong Wu; Allen Park; Ellis Chang; Khurram Zafar; Junqing Huang; Ping Gu; Chris Maher; Grace H. Chen; Songnian Rong; Liu-Ming Wu

Archive | 2004

Dark field inspection apparatus and methods

Grace H. Chen; Tao-Yi Fu; Evan R. Mapoles

Archive | 2006

Systems configured to inspect a specimen

Grace H. Chen; Tao-Yi Fu; Jamie Sullivan; Shing Lee; Greg Kirk

Archive | 2013

WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLUMINATION PUPIL CONFIGURATIONS

Grace H. Chen; Rudolf Brunner; Lisheng Gao; Robert M. Danen; Lu Chen

Archive | 2013

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Pavel Kolchin; Richard Wallingford; Lisheng Gao; Grace H. Chen; Markus b. Huber; Robert M. Danen

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Collaboration

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Lisheng Gao

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David W. Shortt

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Robert M. Danen

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Evan R. Mapoles

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Jamie Sullivan

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Christopher F. Bevis

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Daniel L. Cavan

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Kenong Wu

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Mikhail Haurylau

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Tao-Yi Fu

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