Lisheng Gao | Researchain

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Featured researches published by Lisheng Gao.

Archive | 2011

Detecting defects on a wafer

Junqing Huang; Yong Zhang; Stephanie Chen; Tao Luo; Lisheng Gao; Richard Wallingford

Archive | 2010

Systems and methods for detecting defects on a wafer

Lu Chen; Jason Kirkwood; Mohan Mahadevan; James A. Smith; Lisheng Gao; Junqing Huang; Tao Luo; Richard Wallingford

Archive | 2008

Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system

Richard Wallingford; Stephanie Chen; Jason Kirkwood; Tao Luo; Yong Zhang; Lisheng Gao

Archive | 2014

Detecting defects on a wafer using defect-specific and multi-channel information

Kenong Wu; Lisheng Gao; Grace H. Chen; David W. Shortt

Archive | 2013

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Pavel Kolchin; Richard Wallingford; Lisheng Gao; Grace H. Chen; Markus b. Huber; Robert M. Danen

Archive | 2014

Context-Based Inspection for Dark Field Inspection

Yong Zhang; Tao Luo; Chaohong Wu; Stephanie Chen; Lisheng Gao

Archive | 2016

Optical Die to Database Inspection

Keith B. Wells; Xiaochun Li; Lisheng Gao; Tao Luo; Markus b. Huber

Archive | 2015

SYSTEM AND METHOD FOR DETECTING DEFECT ON WAFER

チェン・ルー; Lu Chen; カークウッド・ジェイソン; Kirkwood Jason; マハデバン・モハン; Mohan Mahadevan; スミス・ジェームス・エー．; A Smith James; ガオ・リシェン; Lisheng Gao; ファン・ジュンチン; Junqing Huang; ルオ・タオ; Luo Tao; ワリングフォード・リチャード; Wallingford Richard

Archive | 2014