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Gregory R. Bettencourt

Lam Research

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Publication

Featured researches published by Gregory R. Bettencourt.

Archive | 2009

Gasket with positioning feature for clamped monolithic showerhead electrode

Gregory R. Bettencourt; Gautam Bhattacharyya; Simon Gosselin Eng; Sandy Chao

Archive | 2010

Clamped monolithic showerhead electrode

Roger Patrick; Gregory R. Bettencourt; Michael C. Kellogg

Archive | 2010

Hot edge ring with sloped upper surface

Akira Koshiishi; Sathya Mani; Gautam Bhattacharyya; Gregory R. Bettencourt; Sandy Chao

Archive | 2003

Substrate holding and spinning assembly and methods for making the same

Gregory R. Bettencourt; Anthony de la Llera; Xuyen Pham

Archive | 2011

CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY

Anthony de la Llera; Pratik Mankidy; Rajlnder Dhindsa; Michael C. Kellogg; Gregory R. Bettencourt; Roger Patrick

Archive | 2013

DUCTILE MODE DRILLING METHODS FOR BRITTLE COMPONENTS OF PLASMA PROCESSING APPARATUSES

Lihua Li Huang; Duane D. Scott; Joseph P. Doench; Jamie Burns; Emily P. Stenta; Gregory R. Bettencourt; John Daugherty

Archive | 2011

Hot edge ring and plasma processing chamber comprising the same

Koshiishi Akira; Sathya Mani; Gautam Bhattacharyya; Gregory R. Bettencourt; Chao Sandy

Archive | 2011

Showerhead electrode for use in a plasma reaction chamber and showerhead electrode assembly

Gregory R. Bettencourt; Gautam Bhattacharyya; Simon Gosselin; Chao Sandy; Anthony de la Llera; Pratik Mankidy

Archive | 2010

Hot edge ring for surrounding silicon substrate of integrated circuit component in plasma processing chamber utilized for processing substrate, involves stage extending from outer periphery of lower surface upwards

Akira Koshiishi; Sathya Mani; Gautam Bhattacharyya; Gregory R. Bettencourt; Sandy Chao

Archive | 2009

Eingespannte monolithische duschkopfelektrode

Roger Patrick; Gregory R. Bettencourt; Michael C. Kellogg

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Gautam Bhattacharyya

Lam Research

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Michael C. Kellogg

Lam Research

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Roger Patrick

Lam Research

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Anthony de la Llera

Lam Research

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Sandy Chao

Lam Research

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Sathya Mani

Lam Research

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Akira Koshiishi

Lam Research

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Pratik Mankidy

Lam Research

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Duane D. Scott

Lam Research

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Emily P. Stenta

Lam Research

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