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Michael C. Kellogg

Lam Research

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Publication

Featured researches published by Michael C. Kellogg.

Archive | 2012

Clamped showerhead electrode assembly

Babak Kadkhodayan; Rajinder Dhindsa; Anthony de la Llera; Michael C. Kellogg

Archive | 2010

Clamped monolithic showerhead electrode

Roger Patrick; Gregory R. Bettencourt; Michael C. Kellogg

Archive | 2010

Movable ground ring for a plasma processing chamber

Michael C. Kellogg; Alexei Marakhtanov; Rajinder Dhindsa

Archive | 2010

Local plasma confinement and pressure control arrangement and methods thereof

Rajinder Dhindsa; Michael C. Kellogg; Babak Kadkhodayan; Andrew D. Bailey

Archive | 2009

Edge rings for electrostatic chucks

Ian J. Kenworthy; Kelly W. Fong; Michael C. Kellogg

Archive | 2010

EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS

Michael S. Kang; Michael C. Kellogg; Miguel A. Saldana; Travis R. Taylor

Archive | 2009

Cam lock electrode clamp

Michael C. Kellogg; Anthony J. Norell; Anthony de la Llera; Rajinder Dhindsa

Archive | 2011

CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY

Anthony de la Llera; Pratik Mankidy; Rajlnder Dhindsa; Michael C. Kellogg; Gregory R. Bettencourt; Roger Patrick

Archive | 2010

C-shaped confinement ring for a plasma processing chamber

Michael C. Kellogg; Alexei Marakhtanov; Rajinder Dhindsa

Archive | 2010

CONSUMABLE ISOLATION RING FOR MOVABLE SUBSTRATE SUPPORT ASSEMBLY OF A PLASMA PROCESSING CHAMBER

Michael C. Kellogg; Alexei Marakhtanov; Rajinder Dhindsa

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Collaboration

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Rajinder Dhindsa

Lam Research

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Alexei Marakhtanov

Lam Research

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Anthony de la Llera

Lam Research

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Christopher Pena

Lam Research

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Gregory R. Bettencourt

Lam Research

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Roger Patrick

Lam Research

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Babak Kadkhodayan

Lam Research

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John Daugherty

Lam Research

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Daniel Arthur Brown

Lam Research

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Andrew C. Lee

Lam Research

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