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Anthony de la Llera

Lam Research

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Publication

Featured researches published by Anthony de la Llera.

Archive | 2012

Clamped showerhead electrode assembly

Babak Kadkhodayan; Rajinder Dhindsa; Anthony de la Llera; Michael C. Kellogg

Archive | 2006

Upper electrode backing member with particle reducing features

Anthony de la Llera; Allan Ronne; Jaehyun Kim; Jason Augustino; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2011

Plasma confinement ring assembly for plasma processing chambers

Anthony de la Llera; David Carman; Travis R. Taylor; Saurabh Ullal; Harmeet Singh

Archive | 2006

Showerhead electrode assembly with gas flow modification for extended electrode life

Jason Augustino; Anthony de la Llera; Allan Ronne; Jaehyun Kim; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2006

Components for a plasma processing apparatus

Anthony de la Llera; Saurabh Ullal

Archive | 2010

Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly

Anthony de la Llera; Pratik Mankidy

Archive | 2009

SHOWERHEAD ELECTRODE WITH CENTERING FEATURE

Babak Kadkhodayan; Anthony de la Llera

Archive | 2009

Cam lock electrode clamp

Michael C. Kellogg; Anthony J. Norell; Anthony de la Llera; Rajinder Dhindsa

Archive | 2003

Substrate holding and spinning assembly and methods for making the same

Gregory R. Bettencourt; Anthony de la Llera; Xuyen Pham

Archive | 2011

CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY

Anthony de la Llera; Pratik Mankidy; Rajlnder Dhindsa; Michael C. Kellogg; Gregory R. Bettencourt; Roger Patrick

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Rajinder Dhindsa

Lam Research

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Michael C. Kellogg

Lam Research

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Xuyen Pham

Lam Research

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Alexei Marakhtanov

Lam Research

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Babak Kadkhodayan

Lam Research

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Pratik Mankidy

Lam Research

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Saurabh Ullal

Lam Research

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Anthony J. Norell

Lam Research

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Gregory R. Bettencourt

Lam Research

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Allan Ronne

Lam Research

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