Guang-Hwa Ma
United Microelectronics Corporation
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Publication
Featured researches published by Guang-Hwa Ma.
international electron devices meeting | 2009
Chien-Ming Lai; Chun-Hsien Lin; Li-Wei Cheng; Che-Hua Hsu; Jung-Tsung Tseng; Tian-Fu Chiang; Cheng-Hsien Chou; Yiwei Chen; Chih-Hao Yu; Shao-Hua Hsu; Cheng-Guo Chen; Zhi-Cheng Lee; J. F. Lin; C. L. Yang; Guang-Hwa Ma; S. C. Chien
A “hybrid” high-k/metal gate (HK/MG) integration scheme is proposed in this paper to accomplish HP (high performance) 28 nm CMOSFETs by integrating gate-first/gate-last (GF/GL) techniques for N/PFET, respectively. For NFET, remarkable mobility (95% of n<sup>+</sup>poly/SiON@1MV/cm) and low V<inf>TH</inf> (0.25 V) was achieved through optimized HfO<inf>2</inf> high-k, TiN metal and LaO<inf>x</inf> capping layer processes. For PFET, an extra 30% performance improvement and a low V<inf>TH</inf> (0.25V) were achieved by GL process as a result of strain boost and VFB roll-off alleviation [1].
Archive | 2010
Chih-Hao Yu; Li-Wei Cheng; Che-Hua Hsu; Cheng-Hsien Chou; Tian-Fu Chiang; Chien-Ming Lai; Yi-Wen Chen; Jung-Tsung Tseng; Chien-Ting Lin; Guang-Hwa Ma
Archive | 2008
Chih-Hao Yu; Li-Wei Cheng; Tian-Fu Chiang; Cheng-Hsien Chou; Chien-Ting Lin; Che-Hua Hsu; Guang-Hwa Ma
Archive | 2008
Yi-Wen Chen; Li-Wei Cheng; Che-Hua Hsu; Chih-Hao Yu; Cheng-Hsien Chou; Chien-Ming Lai; Tian-Fu Chiang; Chien-Ting Lin; Guang-Hwa Ma
Archive | 2008
Chih-Hao Yu; Li-Wei Cheng; Che-Hua Hsu; Tian-Fu Chiang; Cheng-Hsien Chou; Chien-Ming Lai; Yi-Wen Chen; Chien-Ting Lin; Guang-Hwa Ma
Archive | 2007
Chien-Ting Lin; Che-Hua Hsu; Yao-Tsung Huang; Guang-Hwa Ma
Archive | 2009
Chih-Hao Yu; Li-Wei Cheng; Che-Hua Hsu; Tian-Fu Chiang; Cheng-Hsien Chou; Chien-Ming Lai; Yi-Wen Chen; Chien-Ting Lin; Guang-Hwa Ma
Archive | 2008
Tian-Fu Chiang; Li-Wei Cheng; Che-Hua Hsu; Chih-Hao Yu; Cheng-Hsien Chou; Chien-Ming Lai; Yi-Wen Chen; Chien-Ting Lin; Guang-Hwa Ma
Archive | 2007
Chien-Ting Lin; Li-Wei Cheng; Che-Hua Hsu; Yao-Tsung Huang; Guang-Hwa Ma
Archive | 2007
Yao-Tsung Huang; Chien-Ting Lin; Che-Hua Hsu; Guang-Hwa Ma
