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Harnisch Wolfgang

Carl Zeiss AG

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Featured researches published by Harnisch Wolfgang.

Archive | 2005

Mikroskopisches Abbildungssystem und Verfahren zur Emulation eines hochaperturigen Abbildungssystems, insbesondere zur Maskeninspektion

Harnisch Wolfgang; Schuster Karl-Heinz; Scheruebl Thomas; Greif-Wuestenbecker Joern; Rosenkranz Norbert; Totzeck Michael; Stroessner Ulrich; Feldmann Heiko; Gruner Toralf

Archive | 2006

Laser illumination controlling device for use in microscope, has control unit to generate signals for adjusting evaluation and recording unit and/or for controlling laser unit from intensity-power-or energy measured values of detector

Harnisch Wolfgang; Engel Thomas; Menck Alexander

Archive | 2000

Mikroskop, vorzugsweise zur inspektion bei der halbleiterfertigung

Engel Thomas; Harnisch Wolfgang; Scheler Roland

Archive | 2010

Verfahren und Vorrichtung zur Messung des relativen lokalen Lagefehlers eines der Abschnitte eines abschnittsweise belichteten Objektes

Arnz Michael; Beyer Dirk; Harnisch Wolfgang; Scheruebl Thomas

Archive | 2006

MICROSCOPE FOCUSING SYSTEM, AND METHOD ESPECIALLY FOR INSPECTING MASK FOR EMULATING HIGH-APERTURE FOCUSING SYSTEM

Harnisch Wolfgang; Scheruebl Thomas; Rosenkranz Norbert; Schuster Karl-Heinz; Greif-Wuestenbecker Joern; Totzeck Michael; Stroessner Ulrich; Gruner Toralf; Feldmann Heiko

Archive | 2011

APPARATUS FOR INSPECTING OBJECT, ESPECIALLY MASK IN MICROLITHOGRAPHY

Dobschal Hans-Juergen; Harnisch Wolfgang; Scheruebl Thomas; Rosenkranz Norbert; Semmler Ralph

Archive | 2010

X-RAY MICROSCOPE OF REFLECTOR TYPE AND INSPECTION SYSTEM WHICH INSPECT OBJECT ON WAVELENGTH <=100 nm

Mann Hans-Juergen; Dinger Udo; Ulrich Wilhelm; Reinecke Wolfgang; Engel Thomas; Zibold Axel; Harnisch Wolfgang; Wedowski Marco; Pauschinger Dieter

Archive | 2010

REFLEKTIVES ROENTGENMIKROSKOP ZUR UNTERSUCHUNG VON OBJEKTEN MIT WELLENLAENGEN = 100NM IN REFLEXION

Mann Hans-Juergen; Dinger Udo; Ulrich Wilhelm; Reinecke Wolfgang; Engel Thomas; Zibold Axel; Harnisch Wolfgang; Wedowski Marco; Pauschinger Dieter

Archive | 2009

Verfahren zur Maskeninspektion im Rahmen des Maskendesigns und der Maskenherstellung

Harnisch Wolfgang; Zibold Axel; Boehm Klaus; Kalus Christian; Schmoeller Thomas

Archive | 2006

Material for forming resist protective film and resist pattern forming method using the same

Harnisch Wolfgang; Zibold Axel; Boehm Klaus; Kalus Christian; Schmoeller Thomas

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Engel Thomas

Carl Zeiss AG

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Scheruebl Thomas

Carl Zeiss AG

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Zibold Axel

Carl Zeiss AG

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Rosenkranz Norbert

Carl Zeiss AG

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Boehm Klaus

Carl Zeiss AG

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Feldmann Heiko

Carl Zeiss AG

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Greif-Wuestenbecker Joern

Carl Zeiss AG

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Gruner Toralf

Carl Zeiss AG

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Kalus Christian

Carl Zeiss AG

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Mann Hans-Juergen

Carl Zeiss AG

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