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Kimihiro Matsuse

Tokyo Electron

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Publication

Featured researches published by Kimihiro Matsuse.

Archive | 2002

Method of forming a barrier film and method of forming wiring structure and electrodes of semiconductor device having a barrier film

Kimihiro Matsuse; Hayashi Otsuki

Archive | 2005

Method of forming a metal film for electrode

Kimihiro Matsuse; Hayashi Otsuki

Archive | 1999

Apparatus for forming laminated thin films or layers

Tsuyoshi Hashimoto; Kimihiro Matsuse; Kazuya Okubo; Tsuyoshi Takahashi

Archive | 1998

Method and apparatus for forming laminated thin films or layers

Tsuyoshi Hashimoto; Kimihiro Matsuse; Kazuya Okubo; Tsuyoshi Takahashi

Archive | 1998

WIRING STRUCTURE OF SEMICONDUCTOR DEVICE, ELECTRODE, AND METHOD FOR FORMING THEM

Kimihiro Matsuse; Hayashi Otsuki

Archive | 1998

Method of forming semiconductor wiring structures

Kimihiro Matsuse; Hayashi Otsuki

Archive | 1993

Film forming method and device therefor

Takeshi Hashimoto; Kimihiro Matsuse; Kazuya Okubo; Takeshi Takahashi; 和哉 大久保; 公裕 松瀬; 毅 橋本; 高橋 毅

Archive | 2004

TiSiN film forming method, diffusion barrier TiSiN film, semiconductor device, method of fabricating the same and TiSiN film forming system

Hayashi Otsuki; Kunihiro Tada; Kimihiro Matsuse

Archive | 1999

Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film

Hayashi Otsuki; Kunihiro Tada; Kimihiro Matsuse

Archive | 1998

Method of forming a laminated structure of polysilicon and tungsten silicide

Masato Koizumi; Kazuya Okubo; Tsuyoshi Takahashi; Tsuyoshi Hashimoto; Kimihiro Matsuse

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Collaboration

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Kazuya Okubo

Tokyo Electron

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Tsuyoshi Takahashi

Tokyo Electron

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Tsuyoshi Hashimoto

Tokyo Electron

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Hayashi Otsuki

Tokyo Electron

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Masato Koizumi

Tokyo Electron

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Kunihiro Tada

Tokyo Electron

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Kentaro Oshimo

Tokyo Electron

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Kimiya Aoki

Tokyo Electron

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Sakae Nakatsuka

Tokyo Electron

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Takeshi Takahashi

University of Tokyo

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