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Hee-sun Chae

Samsung

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Publication

Featured researches published by Hee-sun Chae.

Archive | 2000

Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same

Dae-sik Cho; Hee-sun Chae; Seok-hyun Kim; Seung-Hoon Tong; Tae-Yang Yoon; Doh-Soon Kwak; Hee-se Kang; Yll-Seug Park; Jae-Seok Oh

Archive | 1998

Dry etching apparatus having upper and lower electrodes with grooved insulating rings or grooved chamber sidewalls

Joung-hyun Lim; Hee-sun Chae

Archive | 1995

Central management system of wet chemical stations

Heung-soo Park; Hee-sun Chae

Archive | 2005

Apparatus and method for processing wafers

Kun-hyung Lee; Soo-Woong Lee; Hyun-Ho Suwon Cho; Hee-sun Chae; Jae-hyung Jung; Sun-Yong Lee

Archive | 2004

Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby

Jeong-Hun Park; Hee-sun Chae; Kyoung-shin Park

Archive | 2000

Lithography system including mechanism for setting optimal process parameters and method of operating the same

Chan-Hoon Park; Hee-sun Chae

Archive | 1998

Vacuum apparatus for semiconductor device

Hee-sun Chae

Archive | 1998

Semiconductor fabricating apparatus with remote belt tension sensor

Hee-sun Chae

Archive | 1998

Method and apparatus for heating chemical used in microelectronic device fabrication

Hee-sun Chae

Archive | 2006

METHOD OF WAFER EDGE EXPOSURE

Gyeong-Hwan Oh; Hee-sun Chae

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Hyun-Ho Suwon Cho

Samsung

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Kun-hyung Lee

Samsung

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Sun-Yong Lee

Samsung

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Chan-Hoon Park

Samsung

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Dae-sik Cho

Samsung

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Doh-Soon Kwak

Samsung

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Gyeong-Hwan Oh

Samsung

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Hee-se Kang

Samsung

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Heung-soo Park

Samsung

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Jae-Hyung Suwon Jung

Samsung

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