Helmi Keskinen

Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis

In this study, a method for fabrication of high aspect ratio silicon nanopillars is presented. The method combines liquid flame spray production of silica nanoparticle agglomerates with cryogenic deep reactive ion etching. First, the nanoparticle agglomerates, having a diameter of about 100 nm, are deposited on a silicon wafer. Then, during the subsequent cryogenic deep reactive ion etching process, the particle agglomerates act as etch masks and silicon nanopillars are formed. Aspect ratios of up to 20:1 are demonstrated. The masking process is rapid, cheap and has the potential to be scaled up for large areas. Three other structured silicon surfaces were fabricated for comparison. All four surfaces were utilized as desorption/ionization on silicon (DIOS) sample plates. The mass spectrometry results indicate that nanopillar surfaces masked with the liquid flame spray technique are well suited as DIOS sample plates.

Size-selected agglomerates of SnO2 nanoparticles as gas sensors

Financial support was provided by ETH Zurich FEL-04 08-3, Finnish Academy, Tekes The Finnish National Technology Agency, and Nanoprim.

Iron Oxide Doped Alumina-Zirconia Nanoparticle Synthesis by Liquid Flame Spray from Metal Organic Precursors

The liquid flame spray (LFS) method was used to make iron oxide doped alumina-zirconia nanoparticles. Nanoparticles were generated using a turbulent, high-temperature (𝑇max∼3000 K) H2-O2 flame. The precursors were aluminium-isopropoxide, zirconium-𝑛-propoxide, and ferrocene in xylene solution. The solution was atomized into micron-sized droplets by high velocity H2 flow and introduced into the flame where nanoparticles were formed. The particle morphology, size, phase, and chemical composition were determined by TEM, XRD, XPS, and N2-adsorption measurements. The collected particulate material consists of micron-sized aggregates with nanosized primary particles. In both doped and undoped samples, tetragonal phase of zirconia was detected in room temperature while alumina was found to be noncrystalline. In the doped powder, Fe was oxidized to Fe2O3. The primary particle size of collected sample was approximately from 6 nm to 40 nm. Doping was observed to increase the specific surface area of the powder from 39 m2/g to 47 m2/g.