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Henry Povolny

Lam Research

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Publication

Featured researches published by Henry Povolny.

Archive | 2010

Plasma processing system control based on rf voltage

Jr. John C. Valcore; Henry Povolny

Archive | 2008

Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body

Rajinder Dhindsa; Henry Povolny; Jerry K. Antolik

Archive | 2009

ADJUSTABLE THERMAL CONTACT BETWEEN AN ELECTROSTATIC CHUCK AND A HOT EDGE RING BY CLOCKING A COUPLING RING

Henry Povolny; Andreas Fischer

Archive | 2014

TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

Anthony Ricci; Henry Povolny

Archive | 2013

System and method for heating plasma exposed surfaces

Henry Povolny; Rajinder Dhindsa

Archive | 2014

System, Method and Apparatus for Refining RF Transmission System Models

Henry Povolny; John C. Valcore

Archive | 2014

System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path

John C. Valcore; Henry Povolny

Archive | 2011

METHODS OF DECHUCKING AND SYSTEM THEREOF

Henry Povolny

Archive | 2015

Arrangement for plasma processing system control based on RF voltage

John C. Valcore; Henry Povolny

Archive | 2014

Etch rate modeling and use thereof with multiple parameters for in-chamber and chamber-to-chamber matching

John C. Valcore; Harmeet Singh; Henry Povolny

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John C. Valcore

Lam Research

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Anthony Ricci

Lam Research

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Harmeet Singh

Lam Research

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Jr. John C. Valcore

Lam Research

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Neil Benjamin

Lam Research

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Rajinder Dhindsa

Lam Research

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Andreas Fischer

Lam Research

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Jerry K. Antolik

Lam Research

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