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Anthony Ricci

Lam Research

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Publication

Featured researches published by Anthony Ricci.

Archive | 2004

Apparatus for spatial and temporal control of temperature on a substrate

Anthony Ricci; Keith Comendant; James E. Tappan

Archive | 2013

THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

Keith Comendant; Anthony Ricci

Archive | 2008

Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system

Anthony Ricci; Jim Tappan; Keith Comendant

Archive | 2011

APPARATUS AND METHOD FOR TEMPERATURE CONTROL OF A SEMICONDUCTOR SUBSTRATE SUPPORT

Anthony Ricci; Saurabh Ullal; Michael Kang; Matthew Busche

Archive | 2014

TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

Anthony Ricci; Henry Povolny

Archive | 2011

Parasitic plasma prevention in plasma processing chambers

Anthony Ricci; Saurabh Ullal; Larry Martinez

Archive | 2012

Method for spatial and temporal control of temperature on a substrate

Anthony Ricci; Keith Comendant; James E. Tappan

Archive | 2008

Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate

Anthony Ricci; Keith Comendant; James E. Tappan

Archive | 2004

Pretreated gas distribution plate

Anthony Ricci; Babak Kadkhodayan

Archive | 2017

Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods

Neil Benjamin; Henry Povolny; Anthony Ricci

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Keith Comendant

Lam Research

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James E. Tappan

Lam Research

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Henry Povolny

Lam Research

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Neil Benjamin

Lam Research

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Saurabh Ullal

Lam Research

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Babak Kadkhodayan

Lam Research

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Ivan L. Berry

Lam Research

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Jim Tappan

Lam Research

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Larry Martinez

Lam Research

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Matthew Busche

Lam Research

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