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John C. Valcore

Lam Research

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Publication

Featured researches published by John C. Valcore.

Archive | 2010

Methods and apparatus for controlling a plasma processing system

John C. Valcore

Archive | 2010

Methods and apparatus for detecting the confinement state of plasma in a plasma processing system

John C. Valcore; James Rogers

Archive | 2012

Impedance-based adjustment of power and frequency

John C. Valcore; Bradford J. Lyndaker

Archive | 2013

Adjustment of power and frequency based on three or more states

John C. Valcore; Bradford J. Lyndaker

Archive | 2012

STATE-BASED ADJUSTMENT OF POWER AND FREQUENCY

John C. Valcore; Bradford J. Lyndaker

Archive | 2014

Control of Etch Rate Using Modeling, Feedback and Impedance Match

Bradford J. Lyndaker; John C. Valcore; Alexei Marakhtanov; Seyed Jafar Jafarian-Tehrani; Zhigang Chen

Archive | 2014

Sub-pulsing during a state

John C. Valcore; Harmeet Singh; Bradford J. Lyndaker

Archive | 2012

Determining a value of a variable on an rf transmission model

John C. Valcore; Bradford J. Lyndaker

Archive | 2014

Segmenting A Model Within A Plasma System

John C. Valcore; Arthur M. Howald

Archive | 2014

Dual Control Modes

John C. Valcore

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Bradford J. Lyndaker

Lam Research

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Arthur M. Howald

Lam Research

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Andrew Fong

Lam Research

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Harmeet Singh

Lam Research

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Henry Povolny

Lam Research

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David Hopkins

Lam Research

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Tony San

Lam Research

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Ed Santos

Lam Research

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James Rogers

Lam Research

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Konstantin Makhratchev

Lam Research

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