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Dive into the research topics where Herbert Palm is active.

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Featured researches published by Herbert Palm.


Microelectronic Engineering | 1999

Charge trapping in ONO interpoly dielectric of FLOTOX EEPROM cells

Eric-Roger Brücklmeier; Andreas Kux; Ronald Kakoschke; Herbert Palm

The threshold voltage loss of erased FLOTOX EEPROM cells with various ONO interpoly dielectric layers has been studied as a function of bake time and programming pulse amplitude. The results show a displacement of electrons injected into the nitride layer to be the root cause of the threshold voltage lowering. A quantitative model has been used for optimizing the cell layer construction as well as the cell operating conditions with respect to a minimized programming voltage at a maximum data retention.


Archive | 2001

Memory cell, memory cell arrangement and fabrication method

Herbert Palm; Josef Willer


Archive | 2003

Method for fabricating a memory cell

Herbert Palm; Josef Willer


Archive | 2002

NROM memory circuit with recessed bitline

Josef Willer; Herbert Palm


Archive | 2005

Semiconductor memory having charge trapping memory cells and fabrication method

Michael Bollu; Armin Kohlhase; Christoph Ludwig; Herbert Palm; Josef Willer


Archive | 2001

Memory cell, memory cell configuration and fabrication method

Herbert Palm; Josef Willer; Achim Gratz; Jakob Kriz; Mayk Roehrich


Archive | 2002

Integrated memory circuit and method of forming an integrated memory circuit

Josef Willer; Herbert Palm


Archive | 2001

Circuit configuration with deactivatable scan path

Herbert Palm; Michael Smola; Stefan Wallstab


Archive | 2003

Semiconductor memory and fabrication method

Michael Bollu; Armin Kohlhase; Christoph Ludwig; Herbert Palm; Josef Willer


Archive | 2000

Semi-conductor component as a delaying device and use thereof.

Eric-Roger Brücklmeier; Herbert Palm; Andreas Kux

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