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Dive into the research topics where Hiroaki Kakiuchi is active.

Publication


Featured researches published by Hiroaki Kakiuchi.


Archive | 2005

Method of manufacturing epitaxial silicon film and plasma processing apparatus

Hiroaki Kakiuchi; Hiromasa Oomi; Heiji Watabe; Kiyoshi Yasutake; 弘章 垣内; 宏昌 大参; 潔 安武; 平司 渡部


Archive | 2006

PROCESS FOR PRODUCING FILM USING ATMOSPHERIC PRESSURE HYDROGEN PLASMA, AND METHOD AND APPARATUS FOR PRODUCING PURIFICATION FILM

Hiromasa Ohmi; Kiyoshi Yasutake; Hiroaki Kakiuchi


Archive | 2007

Plasma processing apparatus and method, gas generating device and method, and fluorine-contained polymer waste disposal method

Hiroaki Kakiuchi; Hiromasa Oomi; Kiyoshi Yasutake; 弘章 垣内; 宏昌 大参; 潔 安武


Archive | 2006

Film Producing Method Using Atmospheric Pressure Hydrogen Plasma, and Method and Apparatus for Producing Refined Film

Hiromasa Ohmi; Kiyoshi Yasutake; Hiroaki Kakiuchi


Archive | 2012

Atmospheric Pressure Plasma Processing Apparatus

Hiroyuki Kobayashi; Hiroaki Kakiuchi; Kiyoshi Yasutake


Journal of the Japan Society for Precision Engineering, Contributed Papers | 2004

Study on the Crucial Factors for Deposition Rate in the High-rate Deposition Process of Polycrystalline Silicon Films by Atmospheric Pressure Plasma CVD

Hiromasa Ohmi; Hiroaki Kakiuchi; Kiyoshi Yasutake; Yasuji Nakahama; Yusuke Ebata; Kumayasu Yoshii; Yuzo Mori


Proceedings of JSPE Semestrial Meeting | 2012

High rate formation and characterization of ZnO thin films using atmospheric-Pressure Radio-Frequency Plasma

Yusuke Mizuno; Shuta Mine; Takahiro Yamada; Hiromasa Ohmi; Hiroaki Kakiuchi; Kiyoshi Yasutake


Archive | 2012

Atmosphärendruck-Plasmabearbeitungsvorrichtung Atmospheric pressure plasma processing apparatus

Hiroaki Kakiuchi; Hiroyuki Kobayashi; Kiyoshi Yasutake


Proceedings of JSPE Semestrial Meeting | 2009

Si Selective Epitaxial Growth by Atmospheric Pressure Plasma CVD

Takayuki Ohnishi; Yutaka Kirihata; Hiromasa Ohmi; Hiroaki Kakiuchi; Kiyoshi Yasutake


應用物理 | 2007

Low-temperature and high-rate growth of epitaxial silicon by atmospheric-pressure plasma chemical vapor deposition

Kiyoshi Yasutake; Hiroaki Kakiuchi; Hiromasa Ohmi

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Yasuji Nakahama

National Archives and Records Administration

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Yusuke Ebata

National Archives and Records Administration

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