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Kiyoshi Yasutake

IBM

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Publication

Featured researches published by Kiyoshi Yasutake.

Archive | 2005

Method of manufacturing epitaxial silicon film and plasma processing apparatus

Hiroaki Kakiuchi; Hiromasa Oomi; Heiji Watabe; Kiyoshi Yasutake; 弘章 垣内; 宏昌 大参; 潔 安武; 平司 渡部

Archive | 2006

PROCESS FOR PRODUCING FILM USING ATMOSPHERIC PRESSURE HYDROGEN PLASMA, AND METHOD AND APPARATUS FOR PRODUCING PURIFICATION FILM

Hiromasa Ohmi; Kiyoshi Yasutake; Hiroaki Kakiuchi

Archive | 2011

METHOD OF MANUFACTURING FILM

Hiromasa Daisan; Takeshi Funaki; Koji Nakahama; Kiyoshi Yasutake; 康治 中濱; 宏昌 大参; 潔 安武; 毅 舩木

Archive | 2007

Plasma processing apparatus and method, gas generating device and method, and fluorine-contained polymer waste disposal method

Hiroaki Kakiuchi; Hiromasa Oomi; Kiyoshi Yasutake; 弘章 垣内; 宏昌 大参; 潔 安武

Archive | 2006

Film Producing Method Using Atmospheric Pressure Hydrogen Plasma, and Method and Apparatus for Producing Refined Film

Hiromasa Ohmi; Kiyoshi Yasutake; Hiroaki Kakiuchi

Archive | 2002

Dry etching method and apparatus

Masao Shimizu; Kumayasu Yoshii; Kiyoshi Yasutake

Journal of the Japan Society for Precision Engineering, Contributed Papers | 2004

Study on the Crucial Factors for Deposition Rate in the High-rate Deposition Process of Polycrystalline Silicon Films by Atmospheric Pressure Plasma CVD

Hiromasa Ohmi; Hiroaki Kakiuchi; Kiyoshi Yasutake; Yasuji Nakahama; Yusuke Ebata; Kumayasu Yoshii; Yuzo Mori

Proceedings of JSPE Semestrial Meeting | 2012

High rate formation and characterization of ZnO thin films using atmospheric-Pressure Radio-Frequency Plasma

Yusuke Mizuno; Shuta Mine; Takahiro Yamada; Hiromasa Ohmi; Hiroaki Kakiuchi; Kiyoshi Yasutake

Archive | 2012

Atmosphärendruck-Plasmabearbeitungsvorrichtung Atmospheric pressure plasma processing apparatus

Hiroaki Kakiuchi; Hiroyuki Kobayashi; Kiyoshi Yasutake

Proceedings of JSPE Semestrial Meeting | 2009

Si Selective Epitaxial Growth by Atmospheric Pressure Plasma CVD

Takayuki Ohnishi; Yutaka Kirihata; Hiromasa Ohmi; Hiroaki Kakiuchi; Kiyoshi Yasutake

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Hiroaki Kakiuchi

Hitachi

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Hiromasa Ohmi

Osaka University

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Kumayasu Yoshii

Osaka University

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Yuzo Mori

Osaka University

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Yasuji Nakahama

National Archives and Records Administration

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Yusuke Ebata

National Archives and Records Administration

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Takeshi Funaki

National Archives and Records Administration

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Hideaki Kawabe

Osaka University

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Masataka Umeno

Osaka University

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Takahiro Yamada

Osaka University

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