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Hiroaki Takaiwa

Nikon

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Publication

Featured researches published by Hiroaki Takaiwa.

Archive | 2004

Wafer table for immersion lithography

Andrew J. Hazelton; Hiroaki Takaiwa

Archive | 2004

Exposure method, substrate stage, exposure apparatus and method for manufacturing device

Soichi Owa; Nobutaka Magome; Shigeru Hirukawa; Yoshihiko Kudo; Jiro Inoue; Hirotaka Kohno; Masahiro Nei; Motokatsu Imai; Hiroyuki Nagasaka; Kenichi Shiraishi; Yasufumi Nishii; Hiroaki Takaiwa

Archive | 2008

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

Soichi Owa; Nobutaka Magome; Shigeru Hirukawa; Yoshihiko Kudo; Jiro Inoue; Hirotaka Kohno; Masahiro Nei; Motokatsu Imai; Hiroyuki Nagasaka; Kenichi Shiraishi; Yasufumi Nishii; Hiroaki Takaiwa

Archive | 2004

Exposure apparatus, exposure method, method for producing device, and optical part

Hiroyuki Nagasaka; Hiroaki Takaiwa; Shigeru Hirukawa; Ryuichi Hoshika; Hitoshi Ishizawa

Archive | 2004

Liquid recovery apparatus, exposure apparatus, exposure method, and device production method

Dai Arai; Hideaki Hara; Hiroaki Takaiwa

Archive | 2004

Exposure apparatus, device producing method, and exposure apparatus controlling method

Nobutaka Magome; Naoyuki Kobayashi; Yasuyuki Sakakibara; Hiroaki Takaiwa

Archive | 2004

Exposure apparatus and method, and manufacturing method of device

Shigeru Hirukawa; Hiroyuki Nagasaka; Hiroaki Takaiwa; 博之 長坂; 宏明 高岩

Archive | 2006

Exposure apparatus and device fabricating method

Hideaki Hara; Hiroaki Takaiwa

Archive | 2005

Magnetic guiding apparatus, stage apparatus, exposure apparatus and device manufacturing method

Kazuya Ono; Hisashi Tanimura; Hiroaki Takaiwa

Archive | 2005

Substrate holding device, exposure apparatus, and device manufacturing method

Makoto Shibuta; Yuichi Yoshida; Hiroaki Takaiwa

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Collaboration

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Hiroyuki Nagasaka

Nikon

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Nobutaka Magome

Nikon

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Shigeru Hirukawa

Nikon

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Jiro Inoue

Nikon

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Kenichi Shiraishi

Nikon

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Masahiro Nei

Nikon

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Yasufumi Nishii

Nikon

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Yoshihiko Kudo

Nikon

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Hideaki Hara

Nikon

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Motokatsu Imai

Nikon

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